Field emission hydrogen sensor based on zinc oxide nanorod as well as preparation method and application of field emission hydrogen sensor
A technology of zinc oxide nanorods and hydrogen sensors, which is applied in the field of hydrogen sensors to achieve the effects of fast recovery, low cost and simple structure
Active Publication Date: 2021-12-03
WENZHOU UNIVERSITY
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However, the low-pressure hydrogen detection and sensing technology of ZnO nanorods has not been reported yet.
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[0024] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings.
[0025] Such as Figure 1 to Figure 4 As shown, in the embodiment of the present invention, the ZnO nanorod array is prepared by a two-step method. First, a ZnO seed layer is spin-coated on the substrate, and then the ZnO nanorod array is obtained on the substrate by a hydrothermal method. In the present invention, the ZnO nanorod array can also be grown by chemical vapor deposition, and the sensor adopts a two-pole structure, and the working principle is field-induced electron emission. The cathode A is a ZnO nanorod array, and the anode B can be flat, pointed or other shapes. At low pressure (pressure less than or equal to 10 -2 Pa), apply a specific cathode voltage V on the anode 1 high voltage V 2 , when the cathode surface electric field strength E 1 Afte...
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The invention discloses a field emission hydrogen sensor based on zinc oxide nanorods and a preparation method and application of field emission hydrogen sensor. According to the invention, the field emission hydrogen sensor comprises a field emission cathode and a field emission anode; the field emission cathode comprises a substrate, a ZnO seed crystal layer arranged on the substrate in a spin coating manner, and a ZnO nanorod array growing on the ZnO seed crystal layer on the substrate, according to the field emission cathode, under the hydrogen partial pressure of 10 <-7 >-10 <-3 > Pa, adsorption of hydrogen on the surface of the field emission cathode enables emission current to be enhanced under the same field intensity, and therefore the field emission cathode has the hydrogen sensing characteristic. The method has the advantages that the method is stable, miniature, simple in structure, fast in recovery and the like, in addition, compared with a traditional carbon nanotube preparation technology (chemical vapor deposition method), the zinc oxide nanorod is prepared by adopting a hydrothermal method, a transition metal catalyst does not need to be used, the temperature is lower (70-95 DEG C), the cost is lower, and the zinc oxide nanorod can grow in a large area.
Description
technical field [0001] The invention relates to a hydrogen sensor, in particular to a zinc oxide nanorod-based field emission hydrogen sensor and its preparation method and application. Background technique [0002] Zinc oxide is a semiconductor material with a wide bandgap (~3.37eV). Zinc oxide nanomaterials can be widely used in gas sensing, energy, piezoelectric, field emission and other fields. Zinc oxide nanomaterials have obvious sensing properties for various gases. In addition, the growth conditions of zinc oxide are simple, easy to prepare, non-toxic and harmless, and it is an environmentally friendly material. By detecting changes in resistance, zinc oxide sensors can be used to detect various gases such as methane, acetylene, ammonia, and nitrogen dioxide. [0003] Hydrogen sensing plays an important role in many scientific and industrial fields. At present, the research and development of hydrogen-based sensing technology is mainly focused on the atmospheric pre...
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IPC IPC(8): G01N27/12
CPCG01N27/127
Inventor 钱维金董明亮董长昆
Owner WENZHOU UNIVERSITY