Thermistor and micro-bolometer based on thermistor
A thermistor and bolometer technology, used in thermometers, resistors, non-adjustable metal resistors, etc., which are directly sensitive to heat by electrical/magnetic components, can solve the problem of thermistor uniformity and thermal stability. It can improve the uniformity of resistance, thermal stability, high heat transfer efficiency and high temperature resistivity.
Pending Publication Date: 2021-12-07
GOALTOP TECH CORP
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Problems solved by technology
[0005] In view of this, aiming at the deficiencies in the prior art, the main purpose of the present invention is to provide a thermistor and a microbolometer based on the thermistor, in which the first aluminum nitride thin film, oxide Vanadium thin film and the second aluminum nitride thin film, based on the excellent thermal conductivity of aluminum nitride, can effectively improve the shortcomings of poor uniformity and thermal stability of the thermistor, so as to meet the needs of high-performance microbolometers
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[0027] Please refer to figure 1 , which shows the thermistor 100 provided by the first embodiment of the present invention. The thermistor 100 of this embodiment is a three-layer stack structure 20 of an aluminum nitride film / vanadium oxide film / aluminum nitride film formed above a substrate 10, and the three-layer stack structure 20 includes a first aluminum nitride film 21. A vanadium oxide thin film 22 and a second aluminum nitride thin film 23.
[0028] In this embodiment, the substrate 10 is a silicon substrate; in practical applications, the material of the substrate 10 can be selected from one of single crystal silicon, single crystal germanium, titanium dioxide, silicon nitride, titanium nitride, glass, sapphire and metal .
[0029] The bottom layer of the three-layer stack structure 20 is the first aluminum nitride film 21, the first aluminum nitride film 21 is used as a buffer layer (buffer layer) between the substrate 10 and the vanadium oxide film 22, and can als...
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Abstract
The invention discloses a thermistor and a micro-bolometer based on the thermistor. According to the thermistor, a three-layer stack structure of a first aluminum nitride thin film, a vanadium oxide thin film and a second aluminum nitride thin film is sequentially formed on a substrate; the first aluminum nitride thin film on the bottom layer has a high heat conductivity coefficient and the excellent temperature uniformity and can serve as a growth foundation of the vanadium oxide thin film; the vanadium oxide thin film on the middle layer serves as a thermosensitive reaction layer, has higher temperature resistance coefficient, higher reaction speed and lower processing temperature and has the wide temperature measuring range; and the second aluminum nitride film on the top layer serves as a passivation layer, and has the excellent heat conductivity, temperature uniformity and the protection effect; furthermore, the three-layer stack structure is manufactured in a micro floating bridge structure of the micro bolometer, so that the temperature uniformity can be improved, and the absorption efficiency of far infrared wavelength of 10-17 microns can be increased.
Description
technical field [0001] The invention belongs to the technical field of semiconductors, in particular to a thermistor and a microbolometer based on the thermistor. Background technique [0002] A thermistor is a resistor that is extremely sensitive to temperature changes. Using its sensitivity to temperature, it has been widely used in temperature measurement, temperature control, temperature compensation, barometric pressure measurement, weather detection, overload protection, etc. [0003] Thermistor-based microbolometer (Microbolometer) is a kind of infrared detector that has developed very rapidly in recent years. It is mainly completed by the micro-pontoon structure. The change in temperature will cause the resistance value of the thermistor to change, and the required information can be obtained by detecting this change. In the micropontoon structure, the thermistor as the core has a great influence on the sensitivity of the microbolometer. At present, the most common...
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Login to View More IPC IPC(8): H01C7/04G01K7/22
CPCH01C7/041H01C7/047G01K7/223
Inventor 严振洪谢辉煌吕胤嘉
Owner GOALTOP TECH CORP