Spectral response micro-nano structure

Abstract

The invention belongs to the technical field of micro-nano structures, and particularly relates to a spectral response micro-nano structure. The micro-nano structure comprises a substrate and a cantilever, one end of the cantilever is connected with the surface of the substrate, and the other end of the cantilever is not connected with the substrate; the cantilever is arc-shaped; a micro-nano pattern is arranged on the surface of the cantilever; a rough structure is arranged on the surface of the substrate; the cantilever is of a composite structure with at least two layers, the current layer number of the cantilever is obtained, a curvature radius calculation model of the corresponding cantilever is obtained based on the current layer number of the cantilever, and then the curvature radius of the corresponding cantilever is calculated according to the curvature radius calculation model of the cantilever; and the bending height of the corresponding cantilever is calculated according to the curvature radius included angle of the cantilever and the curvature radius of the corresponding cantilever. According to the spectral response micro-nano structure provided by the invention, tunable and multifunctional terahertz wave application can be realized by utilizing the electrothermal actuator array prepared based on a micro electro mechanical system technology.

Description

technical field [0001] The present application belongs to the technical field of micro-nano structure, and in particular relates to a micro-nano structure with spectral response. This patent claims the priority of the patent whose application number is 202111051048.1 and whose application date is September 8, 2021. Background technique [0002] The terahertz frequency band in optics refers to electromagnetic waves with a frequency in the range of 0.1-10THz (wavelength 3000-30μm). Its electromagnetic response has attracted much attention due to its wide application in medical sensing, biological science, security inspection, non-destructive testing and other fields. . However, existing terahertz devices are limited by the nonlinear properties of natural materials. Therefore, optical chips based on patterned micro-nano structures are widely used to improve the performance of terahertz devices, and the electromagnetic waves on the sub-wavelength scale can be controlled by pro...

AI Technical Summary

Problems solved by technology

[0003] Although existing optical devices based on micro-nano structures can achieve better characteristics, once the device is fabricated, its characteristics cannot be changed, which will greatly limit the applicability and integration of the device. Therefore, actively adjustable optical devices Become a thermoelectric research

A variety of control mechanisms have been applied to actively control micro-nano structures. The existing control mechanisms mainly include liquid crystal control, laser pump control, phase change material control, etc., which control the optical response by changing the internal properties of the material. However, In the existing tunable micro-nano structures, since the optical response is adjusted by changing the internal properties of the material, such as heat, carrier concentration, etc., these structures will be limited by the nonlinear effects of natural materials. , the optical control range is very limited

Moreover, the spectra of existing micro-nano structures only have a resonance response in a single band, which cannot meet the needs of the design of complex optical devices.

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