Back contact heterojunction solar cell capable of improving insulation isolation effect and manufacturing method thereof

Abstract

The invention relates to a manufacturing method of a back contact heterojunction solar cell capable of improving an insulation isolation effect. The manufacturing method comprises the following steps: dividing a first main surface of a semiconductor substrate into a first conductive region of a first conductive type and a second conductive region of a second conductive type; and etching the internal region of the first conductive region of the first main surface of the semiconductor substrate to form a first conductive region groove, and etching the second conductive region of the first main surface of the semiconductor substrate to form a second conductive region groove. According to the back contact heterojunction solar cell capable of improving the insulation isolation effect and the manufacturing method of the back contact heterojunction solar cell, the process stability is improved, the process complexity caused by multiple times of mask operation is avoided, and the back contact heterojunction solar cell is suitable for large-scale process production.

Description

technical field [0001] The invention relates to a back contact heterojunction solar cell with improved insulation and isolation effect and a manufacturing method thereof. Background technique [0002] Improving the conversion efficiency of industrial production of solar cells is a key research topic for the development of the solar industry and gradually replacing traditional energy sources. The main method to improve the conversion efficiency of solar cells is to increase the electrical parameters such as open circuit voltage, fill factor and short circuit current density. In heterojunction solar cells, an intrinsic amorphous silicon layer is inserted between the amorphous silicon layer and the single crystal silicon substrate, which greatly improves the surface passivation effect of the substrate silicon and can obtain a higher minority carrier lifetime. and open circuit voltage, thereby improving the conversion efficiency. The electrodes of the back-contact solar cell a...

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Problems solved by technology

Both of the above two methods require multiple mask operations and strict alignment requirements, which makes it difficult to guarantee the stability of the production process and is not suitable for large-scale mass production.

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