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Back film structure capable of simultaneously improving back surface efficiency and front surface efficiency of double-sided PERC and preparation method and application of back film structure

A back film and backside technology, applied in the field of solar cells, can solve problems such as increasing the complexity of the preparation process, and achieve the effects of excellent hydrogen passivation, front conversion efficiency improvement, and efficiency improvement.

Pending Publication Date: 2022-04-29
CSI CELLS CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, this invention needs to include a three-layer silicon nitride film that meets the above-mentioned specific conditions, which increases the complexity of the preparation process

Method used

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  • Back film structure capable of simultaneously improving back surface efficiency and front surface efficiency of double-sided PERC and preparation method and application of back film structure
  • Back film structure capable of simultaneously improving back surface efficiency and front surface efficiency of double-sided PERC and preparation method and application of back film structure
  • Back film structure capable of simultaneously improving back surface efficiency and front surface efficiency of double-sided PERC and preparation method and application of back film structure

Examples

Experimental program
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Effect test

Embodiment 1

[0042] In this embodiment, a back film structure is provided. The back film structure includes an aluminum oxide (AlO) film on the back of the cell, a silicon nitride (SiN) film is provided on the aluminum oxide film, and a silicon nitride (SiN) film is placed on the silicon nitride film. A silicon oxynitride (SiON) film is provided on the film.

[0043] Its preparation method comprises the following steps:

[0044] A. Put the back of the battery sheet up, put it into the graphite plate, then put the graphite plate into the ALD plate cavity, coat a layer of AlO film 1 on the back of the battery, and coat it 10 times. The thickness of the AlO film 1 is 8~ 10nm, the refractive index is 1.56;

[0045] B. Put the back side of the cell obtained in step A into the graphite boat, then put the graphite boat into the tubular PECVD, pass ammonia and silane at a flow ratio of 6:1, and place it on the AlO film 1 To prepare SiN film 2, in this step, 6000 sccm of ammonia gas, 1000 sccm of...

Embodiment 2

[0049] In this embodiment, a back film structure is provided. The back film structure includes an aluminum oxide (AlO) film on the back of the cell, a silicon nitride (SiN) film is provided on the aluminum oxide film, and a silicon nitride (SiN) film is placed on the silicon nitride film. A silicon oxynitride (SiON) film is provided on the film.

[0050] Its preparation method comprises the following steps:

[0051] A. Put the back of the battery sheet up, put it into the graphite plate, then put the graphite plate into the ALD plate cavity, coat a layer of AlO film 1 on the back of the battery, and plate 13 times. The thickness of the AlO film 1 is 10~ 12nm, the refractive index is 1.60;

[0052] B. Put the back of the cell obtained in step A upwards into the graphite boat, then put the graphite boat into the tubular PECVD, pass ammonia and silane at a flow ratio of 4.5:1, and place it on the AlO film 1 To prepare SiN film 2, in this step, 6300 sccm of ammonia gas, 1400 scc...

Embodiment 3

[0056] In this embodiment, a back film structure is provided. The back film structure includes an aluminum oxide (AlO) film on the back of the cell, a silicon nitride (SiN) film is provided on the aluminum oxide film, and a silicon nitride (SiN) film is placed on the silicon nitride film. A silicon oxynitride (SiON) film is provided on the film.

[0057] Its preparation method comprises the following steps:

[0058] A. Put the back of the battery sheet up, put it into the graphite plate, then put the graphite plate into the ALD plate cavity, coat a layer of AlO film 1 on the back of the battery, and coat it 15 times. The thickness of the AlO film 1 is 12~ 15nm, the refractive index is 1.63;

[0059] B. Put the back of the cell obtained in step A upwards into the graphite boat, then put the graphite boat into the tubular PECVD, pass ammonia and silane at a flow ratio of 4:1, and place it on the AlO film 1 To prepare SiN film 2, in this step, 6000 sccm of ammonia gas, 1500 scc...

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Abstract

The invention provides a back film structure capable of simultaneously improving double-sided PERC back surface and front surface efficiency and a preparation method and application thereof. The back film structure comprises an aluminum oxide film located on the back surface of a battery piece, a silicon nitride film is arranged on the aluminum oxide film, and a silicon oxynitride film is arranged on the silicon nitride film. According to the back film structure, the back surface efficiency and the front surface efficiency of the double-sided PERC can be simultaneously improved, the back surface conversion efficiency of the P-type double-sided PERC battery is improved by improving the back surface film layer structure, the back film structure has a better hydrogen passivation effect, and the open voltage and the FF of the battery can be improved, so that the front surface conversion efficiency is improved, and the service life of the battery is prolonged. The double-sided rate of the P-type double-sided PERC battery can be improved by 1-2%, the efficiency of the front surface of the battery is improved by about 0.1%, the benefits and competitiveness of enterprises are improved, and the method is very worthy of industrial application.

Description

technical field [0001] The invention belongs to the technical field of solar cells, and relates to a back film structure for simultaneously improving the efficiency of the back and front of a double-sided PERC, and a preparation method and application thereof. Background technique [0002] In recent years, with the continuous improvement of solar cell production technology, the current main research hotspots include HIT cells, WMT cells, N-type bifacial cells, P-type PERC cells, etc. Among them, P-type PERC cells are difficult to mass produce due to their relatively mature technology. Low, has become the mainstream battery technology in the market. The front efficiency of bifacial PERC solar cells is lower than that of other new types of cells. The bifacial ratio of bifacial modules of mainstream manufacturers is 65-75%. There is an urgent need to further improve the front and back efficiencies of bifacial PERC solar cells. Therefore, improving the structure of the back fil...

Claims

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Application Information

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IPC IPC(8): H01L31/0216H01L31/18C23C16/30C23C16/34C23C16/40C23C16/455C23C16/50
CPCH01L31/02167H01L31/1868C23C16/45525C23C16/403C23C16/50C23C16/345C23C16/308
Inventor 曹芳叶晓亚周思洁邹帅王栩生
Owner CSI CELLS CO LTD