Preparation method of lithium ion capacitor based on LiPON solid electrolyte

Abstract

The invention belongs to the technical field of preparation methods of capacitors, and particularly relates to a preparation method of a lithium ion capacitor based on LiPON solid electrolyte, which comprises the following steps of: firstly, arranging a layer of Si substrate; providing an Al target material, and depositing an Al layer current collector on the S Si substrate through reactive magnetron sputtering; preparing a graphene target material, and depositing a graphene layer on the Al layer current collector by taking graphene as the target material and utilizing reaction magnetron sputtering; providing a Li3PO4 target material, and depositing a LiPON electrolyte layer on the graphene layer by using the Li3PO4 as the target material through reactive magnetron sputtering; taking graphene as a target material, and depositing a graphene layer on the LiPON electrolyte layer by utilizing reactive magnetron sputtering; and with Al as a target material, depositing an Al layer current collector on the graphene layer through reactive magnetron sputtering. The characteristics of high specific surface area, high conductivity, high ion mobility and good wettability of graphene are fully utilized, and the lithium ion capacitor with high ion conductivity, good safety performance and long cycle life is prepared.

Description

technical field [0001] The invention belongs to the technical field of preparation methods of capacitors, and in particular relates to a preparation method of lithium ion capacitors based on LiPON solid electrolytes. Background technique [0002] Micro lithium-ion capacitors are a new type of energy storage device between lithium-ion batteries and supercapacitors. They have the advantages of high energy density of lithium-ion batteries and high power density, long cycle life and high safety of supercapacitors. It can realize micro- or nano-scale manufacturing to be coupled with microelectronic systems, and can also be used as an independent micro power source or a micro supplementary energy harvester. The fields of equipment and micro self-powered electronic systems are developing rapidly. [0003] In order to integrate with wearable electronic devices and microelectromechanical systems, lithium-ion capacitors, which have the advantages of both lithium-ion batteries and sup...

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Problems solved by technology

[0006] Aiming at the disadvantages of the above-mentioned liquid electrolytes such as safety problems, flammability, volatility, and narrow electrochemical window, as well as the technical problem of mismatching positive and negative electrode capacities of lithium-ion capacitors, the present invention provides a method for preparing high-efficiency liquid electrolytes by magnetron sputtering. Preparation method of lithium ion capacitor based on LiPON solid electrolyte with high specific energy and fast response

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