Superconducting quantum bit structure based on NbN Josephson junction and preparation method thereof

A superconducting quantum and bit technology, applied in the field of superconducting electronics, to achieve the effects of enhancing coherence, eliminating quantum-phonon coupling, and avoiding the formation of oxides

Pending Publication Date: 2022-06-03
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] In view of the shortcomings of the prior art described above, the purpose of the present invention is to provide a superconducting qubit structure based on NbN Josephson junction and its preparation method, which is used to solve the quantum decoherence caused by quantum-phonon coupling in the prior art and the problem of dielectric loss suppressing coherence time

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  • Superconducting quantum bit structure based on NbN Josephson junction and preparation method thereof
  • Superconducting quantum bit structure based on NbN Josephson junction and preparation method thereof
  • Superconducting quantum bit structure based on NbN Josephson junction and preparation method thereof

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Embodiment 1

[0065] This embodiment provides a preparation method of a superconducting qubit structure based on NbN Josephson junction, such as figure 1 As shown, the flow chart of the preparation method for forming the superconducting qubit structure based on the NbN Josephson junction includes the following steps:

[0066] S1: providing a substrate, and forming a buffer layer on the substrate;

[0067] S2: forming a functional material layer on the buffer layer, the functional material layer including a NbN bottom layer, a TaN barrier layer and a NbN top layer stacked upward;

[0068] S3: Etch the functional material layer to form a functional layer including a resonator, a capacitor, a first Josephson junction and a second Josephson junction, and form an exposed surface covering the functional layer and an upper surface of the substrate the isolation layer;

[0069] S4: thinning the isolation layer to expose the upper surfaces of the first Josephson junction and the second Josephson j...

Embodiment 2

[0110] This embodiment provides a superconducting qubit structure based on NbN Josephson junction, such as Figure 10 As shown, it is a schematic cross-sectional structure diagram of the superconducting qubit structure of the NbN Josephson junction, including a substrate 1, a buffer layer 11, a functional layer 13, an isolation layer 2, a first wiring portion 31 and a second wiring portion 32, wherein the buffer layer 11 is located on the upper surface of the substrate 1, the functional layer 13 is located on the upper surface of the buffer layer 11 and includes spaced capacitors 125, a first Josephson junction 126, a second Josephson junction 127 and resonator 124, the isolation layer 2 fills the functional layer 13 between the resonator 124, the capacitor 125, the first Josephson junction 126 and the second Josephson junction 127 and cover the exposed surfaces of the resonator 124 and the capacitor 125 and the upper surface of the substrate 1, and the isolation layer 2 is pr...

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Abstract

The invention provides a superconducting quantum bit structure based on an NbN Josephson junction and a preparation method thereof.The superconducting quantum bit structure comprises a substrate, a buffer layer, a functional layer, an isolation layer, a first wiring part and a second wiring part, the buffer layer is located on the upper surface of the substrate, and the functional layer is located on the lower surface of the substrate; the functional layer is located on the upper surface of the buffer layer and comprises a capacitor, a first Josephson junction, a second Josephson junction and a resonator which are arranged at intervals, the isolation layer fills gaps in the functional layer and covers the exposed surface of the functional layer and the upper surface of the substrate, and a first contact hole and a second contact hole are formed in the isolation layer; the first wiring portion is filled in the first contact hole and is in contact with the upper surface of the first Josephson junction, and the second wiring portion is filled in the second contact hole and is in contact with the upper surface of the second Josephson junction. According to the invention, the high-resistivity silicon is used as the substrate, and the insulating TaN film is used as the junction region of the Josephson junction, so that the charge fluctuation in the substrate is reduced, and the coherence of the superconducting quantum bit is enhanced.

Description

technical field [0001] The invention belongs to the field of superconducting electronics, and relates to a superconducting quantum bit structure based on NbN Josephson junction and a preparation method thereof. Background technique [0002] A superconducting qubit is a qubit based on a Josephson junction circuit, the main part of which is a superconducting circuit containing one or more Josephson junctions. The structure of the Josephson junction is a thin insulating layer sandwiched between two superconductors. When the thickness of the insulating layer is as thin as a few nanometers, the phases of the wave functions of the two superconductors will be related, and the insulator will become a weak superconductor. Cooper pairs can tunnel to form superconducting currents. In this case, the Josephson junction is equivalent to a nonlinear inductance, and its inductance value changes with the change of the phase difference between the two ends of the junction. Using the nonlinea...

Claims

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Application Information

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IPC IPC(8): H01L39/24H01L39/22H01L39/12G06N10/40
CPCG06N10/00H10N60/85H10N60/12H10N60/0241H10N60/0156H10N60/0912
Inventor 张露陈垒王镇
Owner SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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