Infrared light switch based on thermoelectric coordinated regulation of vanadium dioxide thin film

A vanadium dioxide and thermoelectric synergy technology, applied in the field of infrared optical switches, to achieve the effects of easy control, fast switching speed, and power saving

Active Publication Date: 2022-06-24
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the phase transition temperature of vanadium dioxide is around 68°C, and it is difficult to maximize its properties at room temperature
The vanadium dioxide infrared switch has contradictions in realizing high sensitivity and low voltage control. The vanadium dioxide infrared switch prepared by thermo-optic effect still needs to be improved in sensitivity, and the vanadium dioxide infrared switch prepared by electro-optic effect needs to apply a large voltage. Or high power to achieve better switching effect

Method used

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  • Infrared light switch based on thermoelectric coordinated regulation of vanadium dioxide thin film
  • Infrared light switch based on thermoelectric coordinated regulation of vanadium dioxide thin film
  • Infrared light switch based on thermoelectric coordinated regulation of vanadium dioxide thin film

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Embodiment 1

[0036] A method for preparing a thermoelectrically controlled infrared switch based on vanadium dioxide thin film, the schematic flow diagram of which is as follows figure 2 shown, including the following steps:

[0037] Step 1: Cleaning the Al 2 O 3 The substrate is ultrasonically cleaned with acetone, anhydrous ethanol and deionized water in sequence, and then blown dry with nitrogen for use;

[0038] Step 2: preparing a vanadium ion precursor solution according to a polymer assisted deposition method;

[0039] Step 3: Spin-coat the precursor solution prepared in step 2 on the cleaned sapphire substrate by spin coating. The spin coating is maintained at a low speed of 1000r / min for 10s, and then at a high speed of 6500r / min. 40s;

[0040] Step 4: Place the substrate spin-coated with the precursor solution in step 3 in a tube furnace, and sinter in a nitrogen-hydrogen mixed atmosphere with a hydrogen volume ratio of 1.5%: the temperature is raised to 450° C. for 120 minu...

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Abstract

The invention aims to provide a thermoelectric coordinated control infrared light switch based on a vanadium dioxide thin film, and belongs to the technical field of optical switches. The photoswitch integrates thermoelectric regulation and control, and adopts a patterned metal structure as a heating circuit, so that vanadium dioxide is close to a percolation threshold, and an isolated metal domain is formed, that is, the vanadium dioxide film is always close to a phase change temperature; and meanwhile, an interdigital electrode is arranged on the vanadium dioxide thin film, the volume fraction of a metal phase is increased by applying an electric field, so that a long-range infiltration channel is formed, the vanadium dioxide thin film is driven to generate phase change, and quick response of the optical switch under the low electric field is realized.

Description

technical field [0001] The invention belongs to the technical field of optical switches, in particular to an infrared optical switch based on vanadium dioxide thin film thermoelectric coordinated regulation. Background technique [0002] Optical switch is a device that can realize physical switching or logical operation of optical signals in optical transmission lines or integrated optical circuits, and has important applications in many fields. [0003] According to different optical switch principles, the realization methods of optical switches mainly include traditional mechanical optical switches, micro-mechanical optical switches, thermo-optic switches, liquid crystal optical switches, electro-optic switches and acousto-optic switches. The traditional mechanical optical switch can directly couple the light to the transmission end by moving the optical fiber, and use the prism and mirror to switch the optical path, so that the light is directly sent or reflected to the o...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H03K17/94H03K17/041H03K17/14C23C28/00
CPCH03K17/941H03K17/041H03K17/14C23C28/32C23C28/3455Y02P70/50
Inventor 高敏杨帆林媛路畅徐晨曦
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA
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