Chemical mechanical polishing pads having windows with transparency at low wavelengths and materials for such windows
A polishing material and polishing pad technology, applied in the field of polishing pads, can solve the problems of no transmittance, undesired mechanical properties, etc.
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example 1
[0053] Example 1. Two-step process to form polyurethane compositions
[0054] The PTMEG was heated to 65°C before use. The heated PTMEG and catalyst were added to the mixing cup and vortexed at 1000 RPM for 30 seconds. The H12MDI was then added to the mixing cup and vortexed again for 30 seconds. The mixing cup was then placed in an oven at 80°C for 4 hours to complete the reaction of the isocyanate with the diol. Before using the prepolymer, it was degassed through a vacuum chamber. The degassed prepolymer Voranol TM 800 polyol preheated to 65°C. Add a certain amount of Voranol TM 800 polyol to make unreacted NCO from prepolymer composition: Voranol TM The molar ratio of the hydroxyl groups of the 800 polyol was 1.05:1 and mixed by vortexing. The reaction mixture was degassed again before being added to the mold. The sample in the mold was then heated in an oven to 80°C for 8 hours, followed by a further 4 hours at 110°C.
[0055] For the compositions of the pres...
example 2
[0058] Example 2. Window material characterization
[0059] Various polyurethanes are characterized by various properties such as:
[0060] hardness
[0061] Six 1.5" x 1.5" samples were cut from each substrate. Four samples were used for density testing, while all six samples were used for hardness testing. The length and width of the samples were measured for dimensional density using Fisher Vemier calipers. Sample thickness was measured using a Fowler micrometer. Hardness was measured on a Rex / Hybrid hardness tester with a D probe. For each hardness measurement, six samples were stacked and scrambled so that each sample was probed once.
[0062] tensile test
[0063] Analysis was performed according to ASTM D412-06a "Standard Test Method for Vulcanized Rubber and Thermoplastic Elastomers - Tensile". The samples were die cut to dog bone C size. An Alliance RT / 5 Materials Testing System (MTS) running TestWorks 4 software was used. Data was collected at 500 Hz with ...
example 3
[0074] Example 3. One-step aggregation
[0075] The catalyst, XP2716 and TMP were added to the mixing cup and heated to 80°C until the TMP melted. The mixture was then vortexed and degassed. To the reaction mixture was added H12MDI and then vortexed. The reaction mixture was degassed again before being added to the mold. The sample in the mold was then heated in an oven to 80°C for 8 hours, followed by a further 4 hours at 110°C. The composition of the samples is shown in Table 4. The samples were characterized as described above and the results are shown in Table 5.
[0076] Table 4
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[0078] table 5
[0079]
[0080] image 3 and the transmittance shown in Table 6 shows that the addition of Merpol TM A hard segment inhibitor increases transmission at wavelengths of 250 nm and even lower wavelengths.
[0081] Table 6
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