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Purification method of circulating hydrogen for polycrystalline silicon

A purification method and polysilicon technology, applied in chemical instruments and methods, hydrogen, hydrogen separation, etc., can solve the problems of expensive palladium metal, low energy consumption of processing capacity, high production cost, reduce energy consumption, improve adsorption efficiency, improve The effect of productivity

Active Publication Date: 2022-08-05
YANGZHOU UNIV +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, this method has serious problems in practical application, palladium metal is extremely expensive, and the production cost is extremely high
Therefore, it is an urgent problem to provide a method for purifying recycled hydrogen for polycrystalline silicon with high purity, large processing capacity of a single device and low energy consumption.

Method used

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  • Purification method of circulating hydrogen for polycrystalline silicon
  • Purification method of circulating hydrogen for polycrystalline silicon
  • Purification method of circulating hydrogen for polycrystalline silicon

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0054] A method for purifying circulating hydrogen for polycrystalline silicon, comprising the following operating procedures:

[0055] S1: Pre-purify the hydrogen in the circulating hydrogen storage tank;

[0056] S2: The pre-purified hydrogen that has undergone pre-purification treatment is introduced into the purification device, and under the guidance of the purification device, flows into the selective hydrogen absorbing material along the first direction, and is located in two planes perpendicular to the first direction in the selective hydrogen absorbing material It flows between the two, and flows out of the purification device after passing through the selective hydrogen absorption material;

[0057] In this embodiment, it is preferable that the pre-purified hydrogen passes through the set transition position to realize the transition in the first direction, and the circulation path in the selective hydrogen absorption material after the transition is a straight line ...

Embodiment 1

[0086] Polysilicon production process, its typical tail gas composition is hydrogen, nitrogen, oxygen, hydrogen chloride, trichlorosilane, silicon tetrachloride and trace methane, etc., wherein the hydrogen content is 15-25% (v / v);

[0087] In this embodiment, the pre-purified hydrogen is figure 1 The form of flow along a straight line as shown flows outward in the selective hydrogen absorption material; wherein the diameter of the purification device shell is φ=3m, the effective height is H=8m, and the space filling rate of the hydrogen absorption material in the purification device is 65%; And the selective hydrogen absorption material is AB 5 type hydrogen absorbing alloy LaNi 5 ; Among them, the metal hydride hydrogen storage material is a curd-shaped structure; the diameter of the curd-shaped structure is 15 μm, and the specific surface area is 400 m 2 / g, with a pore volume of 0.6 cm 3 g -1 , the curd-like structure is prepared by surfactant, with high specific surf...

Embodiment 2

[0092] Polysilicon production process, its typical tail gas composition is hydrogen, nitrogen, oxygen, hydrogen chloride, trichlorosilane, silicon tetrachloride and trace methane, etc., wherein the hydrogen content is 15-25% (v / v);

[0093] In this example, under the condition that the size of the purification device is the same as that in Example 1, the pre-purified hydrogen is figure 2 The shown form of flow along the curve flows outward in the selective hydrogen absorption material; here it is clear that the flow path of the arc-shaped curve is greater than the flow length of the straight flow;

[0094] The remaining structures and steps are similar to those in Embodiment 1, and will not be repeated here.

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Abstract

The invention belongs to the field of polycrystalline silicon production, and particularly relates to a purification method of circulating hydrogen for polycrystalline silicon. Comprising the following steps: S1, hydrogen is subjected to pre-purification treatment; s2, introducing the pre-purified hydrogen into a purification device, enabling the pre-purified hydrogen to flow into a selective hydrogen absorption material along a first direction, enabling the pre-purified hydrogen to flow between two planes vertical to the first direction in the selective hydrogen absorption material, and enabling the pre-purified hydrogen to flow out of the purification device after the pre-purified hydrogen passes through the selective hydrogen absorption material; s3, after the adsorbed hydrogen is saturated, the hydrogen absorption process is finished, and the purification device is purged; and S4, reducing the pressure in the purification device, or increasing the temperature of the selective hydrogen absorption material, so that the selective hydrogen absorption material is desorbed to release high-purity hydrogen, and the high-purity hydrogen is collected. The gas adsorption channel distance is greatly increased in the purification device with a certain size, so that the adsorption efficiency is improved. According to the method, the pressure of the pure hydrogen can be increased without adopting a compressor, the production requirement is met, the power consumption of the compressor is saved, and the energy consumption is reduced.

Description

technical field [0001] The invention belongs to the field of polycrystalline silicon production, and in particular relates to a method for purifying circulating hydrogen for polycrystalline silicon. Background technique [0002] In the process of polysilicon production, a large amount of high-purity hydrogen is used as a reducing agent, but only a small part of the high-purity hydrogen entering the reduction unit is consumed by reduction, and most of the remaining hydrogen is discharged together with other reacted gases. , After these discharged mixed gases are separated and purified, other gases are returned to the production unit as raw materials for continued use, and the separated hydrogen (ie, circulating hydrogen) cannot be reduced because it contains a certain amount of other components (impurities). The purity required by the process needs to be purified into high-purity hydrogen before it can continue to be used. [0003] The current purification process of circula...

Claims

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Application Information

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IPC IPC(8): C01B3/50C01B3/00
CPCC01B3/508C01B3/0047Y02P20/129
Inventor 李绿洲丁建宁袁宁一董旭王海范倪永良
Owner YANGZHOU UNIV
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