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Novel push-pull efficient broadband acousto-optic modulator and preparation method thereof

An acousto-optic modulator, push-pull technology, applied in the field of optoelectronics, can solve the problems of large device size, low modulation efficiency, complex process, etc., to achieve the effect of increasing the working bandwidth, increasing the amount of refractive index change, and eliminating electrode reflections

Pending Publication Date: 2022-08-05
JINAN UNIVERSITY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, there are defects such as large device size, low modulation efficiency, narrow bandwidth, and complex process. It can be seen that there are still many difficulties in realizing high-speed, high-efficiency, and broadband acousto-optic modulation. Therefore, high-speed, high-efficiency, and broadband on-chip acousto-optic modulators The research has outstanding practical significance

Method used

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  • Novel push-pull efficient broadband acousto-optic modulator and preparation method thereof
  • Novel push-pull efficient broadband acousto-optic modulator and preparation method thereof
  • Novel push-pull efficient broadband acousto-optic modulator and preparation method thereof

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preparation example Construction

[0038] The invention also provides a preparation method of a novel push-pull type high-efficiency broadband acousto-optic modulator, which is applied to the above-mentioned novel push-pull type high-efficiency broadband acousto-optic modulator, comprising the following steps:

[0039] S1, a layer of chalcogenide glass film is deposited on the substrate covered with the lithium niobate film by thermal evaporation;

[0040] S2, the fabrication of the optical waveguide can be completed after the substrate is exposed, developed and etched;

[0041] S3, after secondary exposure and development, a layer of metal film is plated on the exposed and developed substrate by means of evaporation or micro-electroplating, and then the interdigital transducer can be fabricated through a peeling process.

Embodiment example 1

[0043] like figure 1 As shown, the novel push-pull high-efficiency broadband acousto-optic modulator provided by the implementation case of the present invention adopts a focusing interdigital transducer, which mainly includes a focusing interdigital electrode with an odd number of interdigital fingers on a lithium niobate film and an isotropic electrode on the film. Mass-integrated chalcogenide MZI optical waveguide, the waveguide works in the communication band near 1550nm, and the interdigital transducer excites 1GHz surface acoustic wave. On the one hand, the focused interdigital transducer with an odd number of interdigitated fingers is used to excite the convergent surface acoustic wave, so as to make better use of the energy of the acoustic wave. mode control.

[0044] like figure 2 As shown, the above-mentioned preparation method of the focusing push-pull high-efficiency acousto-optic modulator based on the MZI optical waveguide, the specific steps are as follows: ...

Embodiment example 2

[0055] like image 3 As shown, the new push-pull high-efficiency broadband acousto-optic modulator provided by the implementation case of the present invention adopts a two-electrode interdigital transducer, which mainly includes an odd-numbered interdigital two-electrode interdigital transducer with different lengths on a lithium niobate film. A chalcogenide MZI-type optical waveguide that is heterogeneously integrated with a thin film, and the waveguide works in the communication band around 1550 nm.

[0056] The interdigital transducer can generate 1GHz surface acoustic wave while its working bandwidth can reach 20MHz to 500MHz. The odd-numbered interdigital double-electrode interdigital transducers with unequal lengths are selected, on the one hand, in order to effectively eliminate the reflection of the electrodes and improve the working bandwidth of the microwave; efficient control.

[0057] like Figure 4 As shown, the above-mentioned preparation method of the two-el...

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Abstract

The invention discloses a novel push-pull type efficient broadband acoustic optical modulator and a preparation method thereof. The acoustic optical modulator comprises a substrate, a lithium niobate-chalcogenide glass heterogeneous layer arranged on the substrate and an interdigital transducer arranged on a lithium niobate film. The lithium niobate-chalcogenide glass heterogeneous layer comprises a lithium niobate film and a chalcogenide optical waveguide heterogeneously integrated on the lithium niobate film; the interdigital transducer arranged on the lithium niobate film comprises a plurality of interdigital electrodes, and the interdigital transducer is a focusing type interdigital transducer or a dual-electrode interdigital transducer with different lengths. According to the invention, the focused interdigital transducer is used to excite the convergent surface acoustic wave, sound wave energy is fully utilized, and the change amount of the refractive index of the optical waveguide is improved; or double-electrode interdigital transducers with different lengths are used, so that the problem of electrode reflection is effectively solved, and the microwave working bandwidth is improved; the acousto-optic modulator has the advantages of being high in modulation efficiency, easy to manufacture, large in bandwidth, high in speed and easy to achieve on-chip large-scale integration.

Description

technical field [0001] The invention relates to the technical field of optoelectronics, in particular to a novel push-pull type high-efficiency broadband acousto-optic modulator and a preparation method thereof. Background technique [0002] The acousto-optic control device is a multi-physics coupling element that utilizes the interaction between acoustic waves and light waves, and is an indispensable bridge in the mutual conversion between acoustic waves and light waves. At present, various types of acousto-optic devices have been developed on the market, such as acousto-optic modulators, acousto-optic frequency shifters, acousto-optic deflectors, acousto-optic filters, and acousto-optic Q switches, etc. and effective control of frequency. These acousto-optic functional devices, in essence, are physical devices that are based on Bragg grating diffraction effect and Doppler effect, combined with electro-acoustic transducers and piezoelectric crystal materials, to perform mu...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02F1/125G02F1/11G02F1/00G02B6/136G02B6/13G03F7/20G03F7/32G03F7/38
CPCG02F1/125G02F1/0072G02F1/11G02B6/136G02B6/13G03F7/70383G03F7/32G03F7/38G02B2006/12166G02B2006/12176
Inventor 万磊周文丰温美逊江建滔罗杨
Owner JINAN UNIVERSITY
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