Solid thermal conductivity detector

A thermal conductivity detector and solid-state technology, applied in the field of analytical instruments, can solve problems such as application object restrictions, achieve the effects of simplifying the manufacturing process and requirements, improving temperature resistance, and broadening the application field

Active Publication Date: 2007-05-23
DALIAN INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

It can only be used to measure groups with lower boiling points, and the application objects are limited

Method used

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Effect test

Embodiment 1

[0032] A solid-state thermal conductivity detector, a layer of 0.1mm glass-ceramic 102 is added on a 0.3mm ceramic substrate 101, and 1000 Å is sputtered on the surface of the glass-ceramic layer 102 The nickel layer is then etched to form two symmetrical comb electrodes 113 , and then passivated to form a passivation protection layer 104 . The lead-out line 105 is made by electric fusion welding of the silver wire and the lead-out area of ​​the comb electrode 113 . The fabricated detector substrate 107 is embedded in the surface-passivated brass upper cover 106 to form two independent flow cells with gas inlet and outlet respectively. The distance between the comb electrode 113 and the upper cover 106 is 100 microns. The pair of comb electrodes 113 is connected to an external circuit to form a Wheatstone bridge.

[0033] Use two elastic quartz capillary columns with a length of 20 meters and an internal diameter of 0.53mm to be connected to the two inlets of the detector r...

Embodiment 2

[0035] A solid-state thermal conductivity detector, a layer of 0.2mm glass-ceramic 102 is added on a 0.5mm ceramic substrate 101, and the surface of the glass-ceramic layer 102 is sputtered for 2000 The nickel layer is then etched to form two symmetrical comb electrodes 113 , and a layer of 0.5 μm polyimide is coated on the surface of the comb electrodes 113 to form the protective layer 104 . Lead wires 105 are formed by electric fusion welding of silver wires and the lead area of ​​the comb electrode 113 . The manufactured detector substrate 107 is embedded in the stainless steel upper cover 106 to form two independent flow cells, with gas inlet and outlet respectively. The distance between the comb electrode 113 and the upper cover 106 is 200 microns. The pair of comb electrodes 113 is connected to an external circuit to form a Wheatstone bridge.

[0036] Use two micro-packed stainless steel columns with a length of 2 meters, an inner diameter of 1mm, and a chromatographic...

Embodiment 3

[0038] A solid-state thermal conductivity detector, a layer of 0.1mm glass-ceramic 102 is added on a 0.3mm ceramic substrate 101, and 700°C is sputtered on the surface of the glass-ceramic layer 102 The platinum layer is then etched into four symmetrical comb electrodes 113 , and a layer of 0.5 μm polyimide is coated on the surface of the comb electrodes 113 to form the protective layer 104 . The lead-out wire 105 is made by electrofusion welding of the alloy wire and the lead-out area of ​​the comb electrode 113 . The manufactured detector substrate 107 is embedded in the stainless steel upper cover 106 to form two independent flow cells, with gas inlet and outlet respectively. The distance between the comb electrode 113 and the upper cover 106 is 35 microns. These four comb electrodes 113 are connected to form a Wheatstone bridge.

[0039] Use two elastic quartz capillary columns with a length of 30 meters and an inner diameter of 0.25 mm to be connected to the two inlets...

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Abstract

The present invention is one kind of solid thermal conductivity detector and relates to analysis instrument technology. The gas heat conductivity sensor is used widely in industrial on-line instrument for detecting gas chromatograph and gas composition. The detector of the present invention includes two parts of base body and upper cover. The base body consists of base board, micro crystal glass layer, thermosensitive film electrode, antioxidant protecting layer and lead wires. The base body is scarfed with the upper cover to constitute flow path pond, and the lead wires are led out from one side for electric connection with outer circuit. The detector is stable in the temperature up to 200 deg.c, and has simplified making process and wide application range.

Description

technical field [0001] The invention relates to the technical field of analytical instruments, and relates to a gas thermal conductivity sensor, which is used for detection of gas chromatography and gas composition changes, and is widely used in industrial online instruments. Background technique [0002] The miniaturization of analytical instruments is the mainstream of the development of analytical instruments in the 21st century. Miniaturization not only reduces the volume and weight of the instrument, but also reduces the power consumption and material consumption of the instrument. The most critical part of instrument miniaturization is the miniaturization of detectors or sensors. In 1979, the Surface Physics Laboratory of the Department of Physics of Stanford University developed a solid-state thermal conductivity detector based on a single crystal silicon substrate [IEEE 1979]. [0003] Solid State Thermal Conductivity Detector (SSD) is essentially a gas thermal cond...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N30/66
Inventor 关亚风王海龙朱道乾王涵文苗虹
Owner DALIAN INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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