Production method of millimetric wave voltage-controlled phase shifter for microelectronic machine

A technology of microelectronic machinery and manufacturing methods, which is applied in the direction of optomechanical equipment, manufacturing microstructure devices, and photolithography on patterned surfaces, etc., can solve problems such as high turn-on voltage, poor electrical performance, and small phase shift, and achieve The effect of low turn-on voltage, superior electrical performance, and large phase shift
CN1380245AInactive Publication Date: 2002-11-20EAST CHINA NORMAL UNIVERSITY
0 Cites 10 Cited by

Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
EAST CHINA NORMAL UNIVERSITY
Publication Date
2002-11-20
Estimated Expiration
Not applicable · inactive patent

Smart Images

  • Figure 1
    Figure 1
  • Figure 2
    Figure 2
  • Figure 3
    Figure 3
Patent Text Reader

Abstract

The production method of millimetric wave voltage-controlled phase shifter belongs to the field of microelectronic solid device production technology, and is characterized by that it uses the semifinished product of said invented product, i.e. processed substrate whose surface has etched strip pattern containing grounding conductor strip, signal wire and connecting terminal and on the signal wirethe silicon nitride layer is grown as raw material, adopts prepared thermoprene negative photoresist as sacrificial layer and photoresist coating technology to make 20-30-odd metal microbridges whichare arranged regularly and whose height is uniform and width is identical on the semi-finished product. It possesses excellent electric performance, can be used as millimetric wave voltage-controlledphase shifter.
Need to check novelty before this filing date? Find Prior Art

Description

technical field

[0001] The invention relates to a manufacturing method of a micro-electromechanical (MEMS) millimeter-wave voltage-controlled phase shifter, belonging to the technical field of manufacturing microelectronic solid devices. Background technique

[0002] The microelectromechanical (MEMS) millimeter-wave voltage-controlled phase shifter introduced by N.S.Barker has the advantages of low loss, small size, light weight, easy integration with IC or MMIC circuits, high reliability, and good voltage control performance. One of the key components of wave phased array antenna. The phase shifter mainly includes a substrate 1, a grounding conductive strip 2, a metal micro-bridge 3, a signal line 4 and a terminal 5, the substrate 1 can be quartz, silicon dioxide or gallium arsenide, the grounding conductive strip 2, the signal line 4 and terminal 5 are gold films with a thickness of 5000A deposited on the substrate 1, and silicon nitride (Si X N Y ), t...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More