Producing process and technology for electronic grade water by intergrated film process

Abstract

In the production process, tap water as material water is treated in four parts including pre-treatment unit, the first water purifying system, the second water purifying system and the end film filtering treatment system to prepare electronic level super-pure water. For the treating process, the pre-treatment unit includes sand filtering, superfiltering, active carbon adsorption and nanofiltering; the first water purifying system consists of reverse osmosis, film deairing, electrically deionizing, selective ion exchange resin to eliminate boron impurity and other units; the second water purifying sytem consists of ultraviolet lamp oxidation and polishing mixed bed resin; and the end film filtering treatment is polished reverse osmosis film treatment. The water purifying system has high efficiency, and low cost.

Description

Technical field [0001] The invention relates to a production process and process of ultrapure water, in particular to an integrated membrane process production process and process of electronic grade ultrapure water. Background technique [0002] The ultrapure water referred to in the present invention refers to the removal of various suspended impurities, inorganic ions and non-ionized impurities, including various organic matter, bacteria, viruses and other microorganisms, and fine particles in the water to the limit that can be reached. "Deionized water" or "high resistivity water" or "ultra-high purity water". [0003] The national standard GB / T11446.1-1997 defines "electronic grade water" as "high-purity water used in the process of manufacturing electronic components". The highest level of electronic grade water is the cleaning water used in the production of very large scale and very large scale integrated circuits. The quality requirements of the electronics industry for ...

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Problems solved by technology

[0017] Second, the equipment investment of the first-level pure water system is too high, and the water utilization rate is low

Although the two-stage reverse osmosis can greatly reduce the burden on the subsequent ion exchange column, the investment cost of the system is too high, and the water utilization rate of the water production system is low

Generally, the total water utilization rate of two-stage reverse osmosis does not exceed 35%.

[0019] 3. Terminal fine treatment still cannot fully meet the requirements

At present, the terminal treatment method of 0.1 μm UF-UV (ultraviolet light)-0.04 μm UF is mostly used, but for the production of integrated circuits with an integration level exceeding 64 MDRAM, it is still impossible to ensure that the indicators such as particles in the product water are qualified

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