Method for preparing lithium ion solid electrolyte film with large area

A solid electrolyte, lithium ion technology, applied in the field of preparing nitrided Li3PO4 thin films, can solve the problems of rough surface, poor physical properties of deposited thin films, difficult to popularize and apply all-solid thin film lithium ion batteries, etc., and achieve the effect of high ionic conductivity

Inactive Publication Date: 2003-10-08
FUDAN UNIV
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Problems solved by technology

Since the pressure of nitrogen gas in the deposition process is between 1 and 50 Pa, the physical properties of the deposited film are poor and the surface is rough, so it is difficult to popularize and apply it in the preparation

Method used

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Embodiment Construction

[0013] The method of the present invention is further described below by way of examples.

[0014] In an embodiment, an electron beam heating method is used in combination with a nitrogen ion source generator. The implementation of the method is carried out in a vacuum system of electron beam evaporation. First, use a molecular pump to pump the air pressure of the vacuum chamber to 1.0×10 -3 Pa. The vacuum system is also equipped with an ion-coupled plasma (ICP) device. The operating power of the ion-coupled plasma is 250 watts. A needle valve controls the flow of high-purity nitrogen gas (99.99%) into the ion-coupled plasma chamber, and the generated nitrogen plasma freely diffuses into the evaporation vacuum chamber, and the direction of the diffusion port faces the deposition substrate. Adjust the nitrogen flow to keep the air pressure in the vacuum reaction chamber at 2×10 -2 Pa. During evaporation, the electron gun outputs 400 watts of power. Substrate and LiPO 3 ...

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Abstract

The film of lithium, phosphor, oxygen and nitrogen (LiPON) is deposited by using the combination of the electron beam heating method and the mitrogen ion source generator. Comparing with the method of radio frequency magnetron sputtering, the deposited area is increased nearly 10 times. The conductivity of Li ion of the LiPON film prepared by the invention can reach 2-5X10 to the power -6 s/cm. Combining with electrodes of the thin film of Ag0.5V2O5 etc. and the metal Li film electrodes, thin film Li ion battery in full solid state can be assembled.

Description

technical field [0001] The invention relates to a method capable of preparing a large-area lithium ion solid electrolyte film, specifically a method for preparing lithium nitride 3 PO 4 (referred to as lithium phosphorus oxynitride) thin film method, the prepared thin film can be applied to the preparation of all solid thin film lithium ion battery. Background technique [0002] With the miniaturization of microelectronic devices, it is urgent to develop a matching miniaturized and long-life power supply. Compared with other chemical batteries, the all-solid-state rechargeable lithium-ion thin-film battery has the characteristics of large specific capacity, long charge and discharge life, and good safety performance. The research and development of all-solid-state rechargeable lithium-ion thin-film battery has a wide range of application backgrounds. . All-solid-state thin-film lithium-ion batteries can be divided into two categories according to the polymers and inorgani...

Claims

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Application Information

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IPC IPC(8): C23C14/06C23C14/22H01M2/14H01M10/02
CPCY02E60/10Y02P70/50
Inventor 傅正文秦启宗刘文元赵胜利
Owner FUDAN UNIV
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