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Surface modified quartz glass crucible and its modification process

A quartz glass crucible, surface modification technology, applied in crucible furnace, glass forming, glass manufacturing equipment, etc.

Inactive Publication Date: 2003-10-15
JAPAN SUPER QUARTZ CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] The present invention solves these problems associated with conventional quartz glass crucibles and proposes a surface-modified quartz glass crucible with a coating having sufficient adhesion strength and durability, and a method of modification thereof

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0037] A coating liquid containing a toluene solution of barium 2-ethylhexanoate was sprayed onto the entire surface of a quartz glass crucible, and a coating layer was formed by heating the coating liquid at the temperature and time shown in Table 1. The crucible is made by arc fusion rotational molding, which is commonly used in the production of crucibles for pulling single crystals.

[0038] Also, comparative examples are shown in Table 1 for the quartz glass crucibles described below. They include crucibles similarly sprayed but not baked at a high enough temperature (No. 7), uncoated crucibles (No. 8), and crucibles with conventionally bonded barium carbonate powder without baking (No. 9).

[0039] For the shown quartz glass crucibles, the strength of the coating was evaluated according to standard specifications (JIS5600-5-4).

[0040] This evaluation was performed by the scribing method using a marker pen (trade name: Mitsubishi UNI). These results are shown in Table...

Embodiment 2

[0044] For quartz glass crucibles with the coatings indicated in Table 1, No. 3, multiple pull tests were performed, in which the pull of single crystal silicon was repeated by refilling the crucible with polycrystalline silicon after single crystal pulling . In addition, the recharging is performed without lowering the temperature. These results are shown in Table 2. Also, a comparative test of a conventional quartz glass crucible (No. 9) with barium carbonate powder in Table 1 is also shown in Table 2.

[0045] serial number

Coating fluid

to bake

Measure with a pencil

obtained hardness

sticky barium oxide

Attachment

Pulled single crystal

Metal type:

content

solvent

℃

minute

washing

forward

washing

rear

Yield%

crystal layer

thickness

1

Ba: 1

toluene

850

30

None under 6H

to crack

52

52 ...

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PUM

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Abstract

A surface modified fused quarts crucible and method of modifying its surface. All or a part of the inner and / or outer surface of the surface modified fused quarts crucible, has a coating layer of a burned metal oxide. Preferably, the metal oxide comprises one or more selected from magnesium, calcium, strontium, and barium. The coating layer does not exfoliate easily and in which a good rate of single crystallization can be achieved.

Description

technical field [0001] The present invention relates to a surface-modified quartz glass crucible and a modification method thereof, wherein the crucible is used in a method of pulling single-crystal silicon for semiconductors and the like from molten silicon. Background technique [0002] One cause of dislocation formation in single crystal silicon during the pulling process of single crystal silicon is recognized as the release of cristobalite formed on the inner surface of the quartz glass crucible into the molten silicon. It is also known that a process of coating an alkaline earth metal as a crystallization accelerator on the inner surface of a crucible to form a cristobalite layer on the inner surface of the crucible at an early stage of drawing (for example, US5976247 or JP3100836) is a countermeasure to this problem . In these inventions, a barium hydroxide solution or the like is coated on the surface of a quartz glass crucible and the coated barium hydroxide reacts...

Claims

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Application Information

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IPC IPC(8): C03B20/00C03C17/25C03C17/27C30B15/10C30B29/06
CPCC30B15/10C03C17/25C03C17/27C03B20/00
Inventor 辻元俊夫辻义行
Owner JAPAN SUPER QUARTZ CORP
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