Orgaic polymer-inorganic nano composite resistance type thin film humidity sensitive element and its manufacturing method

An organic polymer, inorganic nanotechnology, applied in electrical components, electrical solid devices, circuits, etc., can solve problems such as unsatisfactory stability and reliability, poor resistance to high humidity environments, and hindering the practical application of humidity sensors. Achieve the effect of improving resistance to high humidity environment, good component consistency, and high yield

Inactive Publication Date: 2003-12-03
上海华实纳米材料有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, both inorganic and organic polymer humidity-sensitive materials have shortcomings such as poor resistance to high-humi

Method used

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  • Orgaic polymer-inorganic nano composite resistance type thin film humidity sensitive element and its manufacturing method
  • Orgaic polymer-inorganic nano composite resistance type thin film humidity sensitive element and its manufacturing method
  • Orgaic polymer-inorganic nano composite resistance type thin film humidity sensitive element and its manufacturing method

Examples

Experimental program
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Example Embodiment

[0018] The humidity sensitive film is prepared by immersing the glass-ceramic interdigital gold electrode in a moisture-sensitive liquid for 1 to 3 minutes by using a dip coater. After pulling it out, it is naturally dried at room temperature for 20 to 60 minutes, and heat treated at 80 to 140°C. For 0.5 to 4 hours, then place it in an acidic aqueous solution with a pH of 1 to 6 for 2 to 60 minutes, then dry the element, and heat at 80 to 120°C for 1 to 4 hours.

[0019] The moisture-sensitive liquid is (1) a silicon-containing polyelectrolyte with the structure (I), where X- is a halide ion, and the letter y is a number from 1 to 8;

[0020] (2) Nano ZnO colloid, in which the size of inorganic nanoparticles is less than 50 nanometers. The two are configured into an ethanol solution with a weight percentage concentration of 0.5% to 5% in a weight ratio of 1:0.05 to 0.6.

Example Embodiment

[0021] Examples:

[0022] 1) Electrode cleaning

[0023] The glass-ceramic interdigital gold electrode is soaked in absolute ethanol and acetone, ultrasonically cleaned, and dried for later use;

[0024] 2) Dip coating humidity sensitive film and post-treatment

[0025] Dip the ceramic interdigital gold electrode into the moisture-sensitive liquid for 1 to 3 minutes using a dip coater, then pull it out, dry it naturally at room temperature for 20 to 60 minutes, heat treatment at 80 to 140°C for 0.5 to 4 hours, and then place it in PH= In the acidic aqueous solution of 1 to 6 for 2 to 60 minutes, the components are dried and heated at 80 to 120°C for 1 to 4 hours.

[0026] The moisture sensing liquid is (1) a silicon-containing polyelectrolyte with the structure (II);

[0027] (2) Nano ZnO colloid, in which the size of inorganic nanoparticles is less than 50 nanometers. The two are configured into an ethanol solution with a weight percentage concentration of 0.5% to 5% in a weight...

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Abstract

An organic high-molecule/inorganic nano composite resistance type moisture-sensitive film element is prepared through providing microcrystal glass as substrate, arranging multiple pairs of interdigital gold electrodes on it, immersing it in moisture-sensing liquid to become film, heat treating and cross-linking. Its advantages are low cost, high water-proofing nature, response linearity and sensivity, and high response speed.

Description

technical field [0001] The invention relates to an organic macromolecule-inorganic nanocomposite resistive thin film humidity sensitive element and a manufacturing method thereof. Background technique [0002] Humidity sensors are an important class of chemical sensors, which are widely used in storage, industrial production, process control, environmental monitoring, household appliances, meteorology, etc., such as grain anti-mildew, high-altitude weather detection, greenhouse planting, etc. attention and research. Humidity-sensitive materials currently used mainly include inorganic oxide ceramics and organic polymers, and the development of organic polymer resistive humidity-sensitive materials is relatively rapid. However, both inorganic and organic polymer humidity-sensitive materials have shortcomings such as poor resistance to high-humidity environments, unsatisfactory stability and reliability, which greatly hinder the practical application of...

Claims

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Application Information

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IPC IPC(8): G01N27/02H01L49/00
Inventor 李扬佘勇黄德欢杨慕杰
Owner 上海华实纳米材料有限公司
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