Method and apparatus for generating X-ray or EUV radiation

A jet body and generator technology, applied in the direction of irradiation device, X-ray tube parts, X-ray tube target and converter, etc., can solve the problems of low efficiency and low efficiency
CN1466860AInactive Publication Date: 2004-01-07伊克斯勒姆股份公司
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Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
伊克斯勒姆股份公司
Publication Date
2004-01-07
Estimated Expiration
Not applicable · inactive patent

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Abstract

In a method and an apparatus for generating X-ray or EUV radiation, an electron beam is brought to interact with a propagating target jet, typically in a vacuum chamber. The target jet is formed by urging a liquid substance under pressure through an outlet opening. Hard X-ray radiation may be generated by converting the electron-beam energy to Bremsstrahlung and characteristic line emission, essentially without heating the jet to a plasma-forming temperature. Soft X-ray or EUV radiation may be generated by the electron beam heating the jet to a plasma-forming temperature.
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Description

technical field

[0001] The present invention relates generally to a method and apparatus for producing X-rays or extreme ultraviolet (EUV) radiation, and more particularly to high intensity X-rays or extreme ultraviolet (EUV) radiation. The radiation produced can be used, for example, in medical diagnostics, non-destructive testing, lithography, microscopy, materials science, or some other X-ray or EUV application. Background technique

[0002] X-ray sources with high power and brightness are used in many fields, such as medical diagnosis, non-destructive testing, crystal structure analysis, surface physics, lithography, X-ray fluorescence and microscopy.

[0003] In some applications, X-rays are used to image the interior of objects that are opaque to visible light. For example, in medical diagnosis and material inspection, X-ray radiation of 10-1000keV is used, that is, hard X-ray radiation . Conventional hard X-ray sources, in which an electron beam is accelerated to a ...

Claims

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