Al-Ga-In-As multi-quantum sink super radiation luminous diode
A technology of superluminescence and multiple quantum wells, which is applied in the field of aluminum gallium indium arsenic multi-quantum well superluminescent light-emitting diodes, can solve problems such as the unspecified fabrication structure, improve quantum efficiency and high temperature characteristics, and reduce series resistance , Improve the effect of injection efficiency
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[0018] The AlGaInAs / InP material system is adopted, and the light emitting wavelength range of the active region is 1.25 μm to 1.65 μm. Specifically, it includes the lower cladding layer on the n-type InP substrate, the upper and lower confinement layers (SCH) and the multi-quantum well active region located therein, wherein the thickness of the well is 5-10nm, and the total thickness of the well barrier in the active region Between 10-500nm, the multi-quantum well active region has 4-10 pairs of well barriers.
[0019] Wherein the separate confinement layer is a stepped structure or a slowly changing separate confinement structure (GRIN-SCH), and above the upper confinement layer are an upper cladding layer, an etching cut-off layer, an optical confinement layer and an ohmic contact layer.
[0020] Usually the RWG structure is a vertical mesa-shaped ridge waveguide, which easily causes the problem of large series resistance of the device. In order to reduce the series resist...
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