One-chip silicon-base miniature capacitor microphone and manufacturing method thereof

A micro-capacitor and microphone technology, applied in the field of electro-acoustics, can solve the problems such as the adhesion of the diaphragm and the back plate, the high production cost, the decline in the yield, etc., and achieve the effect of reducing the production accuracy of the process and the requirements of the equipment
CN1694576AInactive Publication Date: 2005-11-09FUDAN UNIV +2
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Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
FUDAN UNIV
Publication Date
2005-11-09
Estimated Expiration
Not applicable · inactive patent

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Abstract

This invention relates to a new structure single chip silicon-base micro-condenser microphone in which, the vibration film is processed by high elastic mono-crystal silicon film, the back pole plate is made up of PI thick films, the diaphragm electrode and the back electrode are led out by concentrated boron buried electrode, only a metal layer with the thickness greater than 1 mum is processed on the hot-pressed feet, micro-acoustic holes are set on the back pole plate, a JFET source follower is integrated on the front of a mono-crystal silicon substrate forming vibration films to reach the aim of impedance transformation. The mono-crystal silicon film is released by HF vapor phase corroding technology, no adhesion occurs between the vibration film and the back pole plate to increase the rate of product greatly.
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Description

technical field

[0001] The invention belongs to the field of electroacoustic technology, and in particular relates to a monolithic silicon-based miniature capacitive microphone and a manufacturing method thereof. Background technique

[0002] Silicon-based miniature microphones are a research hotspot in the field of electroacoustic technology around the world, and are the direction to replace traditional FEP microphones in the future. Its advantages are: small size, high temperature resistance, suitable for large-scale automated production lines, easy to mass produce, and can also be integrated with ICs to form a microsystem. The diaphragms of existing silicon-based miniature condenser microphones all use materials such as silicon nitride / silicon dioxide composite films, polysilicon / silicon nitride composite films, polysilicon films, and polyimide films. The use of a composite film is mainly due to the fact that the single film material will have tensile or compressive stre...

Claims

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