Unlock instant, AI-driven research and patent intelligence for your innovation.

Liquid crystal display device and producing method thereof

A technology of a liquid crystal display device and a manufacturing method, which is applied in the direction of photolithographic exposure devices, transistors, static indicators, etc., and can solve the problems of damaged flatness of the array substrate 1, reduced productivity, difficulty in maintaining the flatness of the glass substrate, etc., and achieves The effect of short program lead time and high productivity

Active Publication Date: 2006-05-17
AU OPTRONICS CORP
View PDF3 Cites 14 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Also, the prior art shown in Patent Document 2 reduces the number of required photomasks to three, but additionally requires a process for water repellency treatment and a process for removing the water repellency, which is a factor that reduces productivity.
In addition, because the flattening film serving as the bottom layer of the pixel electrode 11A is exposed to the half-tone process, the flatness of the surface of the array substrate 1 is damaged, resulting in a high possibility of deterioration of the display performance such as a decrease in contrast.
However, in the prior art shown in Patent Document 3, it is necessary to add a new chemical mechanical polishing process. In addition, it is difficult to maintain the flatness of the glass substrate in the grinding process of a large-area glass substrate with a side length of more than 1 m, and Patent Document 2 Also, halftoning has the potential to adversely affect display performance

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Liquid crystal display device and producing method thereof
  • Liquid crystal display device and producing method thereof
  • Liquid crystal display device and producing method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0038] First, if figure 1 As shown in (A), chromium, molybdenum, tantalum, aluminum, copper, or alloys or laminates thereof are formed as the first metal film 2 on one surface of the glass substrate 1 using a film forming apparatus such as a sputtering apparatus. Next, a photoresist is coated on one surface of the first metal film 2, and a first photomask is used to form figure 1 (B) Photoresist pattern 3 shown. Then, after etching the first metal film 2 using the photoresist pattern 3 as a mask, the photoresist pattern 3 is removed to form figure 1 (C) Gate film 2A shown.

[0039] Then use a plasma CVD device or a sputtering device such as figure 2 (C) shows covering the first silicon nitride film 4 as the gate insulating layer, the first silicon film 5 as the channel of the transistor, and the second silicon film 6 doped with N-type impurities. In addition, chromium, molybdenum, tantalum, aluminum, copper, or alloys or laminates thereof are coated as the second metal...

Embodiment 2

[0044]As known from Embodiment 1, in the present invention, the pixel electrode does not need to be patterned, and the conductive film for the pixel electrode is physically and electrically separated by using the deep groove 15 formed in the photosensitive acrylic resin film 10. That's it. Therefore, when a high-reflectance metal such as aluminum or aluminum alloy or silver or silver alloy is used as the conductive thin film for the pixel electrode, the pixel electrode (reflective electrode) of a reflective liquid crystal display device can be obtained. These metals are usually coated by sputtering, and their film thickness is equal to that of a transmissive transparent electrode, generally about 0.1 μm. This also includes the meaning of avoiding a decrease in reflectance due to the crystal growth phenomenon accompanying an increase in film thickness.

[0045] However, although not shown in the figure, in order to avoid specular reflection, the substrate of the pixel electrod...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

PropertyMeasurementUnit
thicknessaaaaaaaaaa
thicknessaaaaaaaaaa
Login to View More

Abstract

The invention provides a liquid crystal display device and a manufacturing method thereof. The TFT array substrate of the liquid crystal display device uses less number of photolithography procedures or masks than the current situation, so as to reduce the manufacturing cost. The present invention provides a new technology for forming a TFT array substrate for a display device by using three masks. This novel technology is to use a photosensitive acrylic resin film to form a contact in the photolithography process. By means of a photomask with a phase shift effect, the taper required in the general contact hole part is formed at the same time in only one photolithography process. pattern and a fine pattern with a relatively vertical cone shape, the subsequent process can separate the pixel electrode pattern without using a photolithography process.

Description

【Technical field】 [0001] The invention relates to a flat display device such as a liquid crystal display device with a TFT array substrate and a manufacturing method thereof. 【Background technique】 [0002] In recent years, the development of substitute products for CRT flat-panel display devices has been very popular. So far, liquid crystal display devices, which have been developed from small-sized mobile displays to large-sized TV displays, are widely popular. [0003] A liquid crystal display device is an electro-optical device that sandwiches liquid crystals between two substrates. Active liquid crystal display devices with excellent display performance widely use array substrates. The signal lines and scanning lines are formed in a grid pattern, and thin film transistors (hereinafter abbreviated as TFTs) using semiconductor thin films such as amorphous silicon are provided as switching elements at intersections of the signal lines and scanning lines. In order to manuf...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): G02F1/136G02F1/133G02F1/1335G03F7/20H01L29/786
CPCG02F1/136227H01L29/78633H01L27/124H01L27/1288G02F1/136236
Inventor 堀野滋和董畯豪曾贤楷
Owner AU OPTRONICS CORP