Vacuum seal welding method for window and optic window of low temperature metal Dewar

A technology of optical window and welding method, applied in welding equipment, metal processing equipment, vacuum evaporation coating and other directions, can solve the problems of increased permeability, contamination of detectors, high temperature resistance, etc., and achieves a small outgassing rate. Effect
CN1820885AInactive Publication Date: 2006-08-23SHANGHAI INST OF TECHNICAL PHYSICS - CHINESE ACAD OF SCI
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
SHANGHAI INST OF TECHNICAL PHYSICS - CHINESE ACAD OF SCI
Publication Date
2006-08-23
Estimated Expiration
Not applicable · inactive patent

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Abstract

The present invention discloses the method of low temperature vacuum sealing and welding between the window frame and the optical window of metal Dewar. In the welding between the window frame of kovar alloy material and the optical window of infrared transmitting material, the optical window is first vacuum plated to form Cr / Au coating as the transition layer in the parts to be welded, and the welding in performed with In as welding material at low temperature. The present invention has the outstanding advantage of low temperature welding producing no negative effect on the antireflective coating in the infrared window. Using soft In as the welding material can buffer the difference between the optical window material and the kovar alloy material in expansion coefficient. The metal Dewar has gas leakage rate superior to 3E(-12) torr.liter / sec and gas releasing rate far lower than that of traditional technological process.
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Description

technical field

[0001] The invention relates to a low-temperature metal Dewar welding process for an infrared focal plane detector, in particular to a vacuum-tight welding method for a window frame and an optical window of a low-temperature metal Dewar. Background technique

[0002] The high-vacuum low-temperature metal Dewar is the key component to ensure the normal operation of the low-temperature infrared focal plane detector. The infrared radiation signal is incident on the infrared focal plane detector through the infrared optical window of the low-temperature metal Dewar, and the infrared focal plane detector converts the radiation signal into an electrical signal for output. The infrared optical window is made of glass, quartz, germanium, silicon, zinc sulfide, zinc selenide, sapphire and other materials through optical processing. It is connected with the metal Dewar through the Kovar alloy window frame. The quality will directly affect the vacuum degree of Dewar, a...

Claims

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