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Soldering method, solder pellet for die bonding, method for manufacturing solder pellet for die bonding and electronic component

A chip welding and manufacturing method technology, applied in the direction of welding/cutting medium/material, welding medium, electrical components, etc., can solve the problems of poor heat dissipation, device performance degradation, poor wettability, etc., and achieve sufficient joint strength and reliability good effect

Active Publication Date: 2007-06-06
SENJU METAL IND CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, lead-free solders have poor wettability compared to Sn-Pb based solders, so many voids are generated in flux-free die soldering joints
If a large number of voids are generated when die bonding is performed in this way, not only the heat dissipation will be deteriorated, but also the bonding strength will be weakened. Cracks are generated, which hinder heat dissipation from semiconductor elements and degrade the performance of the device

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0020] A 10×10×0.3 (mm) semiconductor element chip was bonded to a 30×30×0.3 (mm) substrate (nickel-plated copper substrate) by soldering with solder particles. The lead-free solders used are as shown in Table 1, and are those in which P was added to the Sn-Cu-Ni-based solder. The shape of the solder particles is formed into 10×10×0.1 (mm), the solder particles are sandwiched between the semiconductor element and the substrate, and the temperature is above 235°C in a hydrogen-nitrogen mixed gas atmosphere with an oxygen concentration of 50ppm. Heating was performed for 3 minutes, the peak temperature was 280° C., and reflow was performed with a total reflow time of 15 minutes. The thickness and metal composition of the protective film formed on the surface were measured by xps. Furthermore, the porosity was measured by observing the voids in the die-bonded portion through an X-ray apparatus.

Embodiment 2

[0022]A 10×10×0.3 (mm) semiconductor element chip was bonded to a 30×30×0.3 (mm) substrate (nickel-plated copper substrate) by soldering with solder particles. The lead-free solders used are as shown in Table 1, and are those in which P was added to the Sn-Ag-Cu-based solder. The shape of the solder particles is formed into 10×10×0.1 (mm), the solder particles are sandwiched between the semiconductor element and the substrate, and the temperature is above 235°C in a hydrogen-nitrogen mixed gas atmosphere with an oxygen concentration of 50ppm. Heating was performed for 3 minutes, the peak temperature was 280° C., and reflux was performed with a total reflux time of 15 minutes. The thickness and metal composition of the protective film formed on the surface were measured by XPS. Furthermore, the porosity was measured by observing the voids in the die-bonded portion through an X-ray apparatus.

Embodiment 3

[0024] A 10×10×0.3 (mm) semiconductor element chip was bonded to a 30×30×0.3 (mm) substrate (nickel-plated copper substrate) by soldering with solder particles. The lead-free solders used are as shown in Table 1, and are those in which P was added to the Sn-In-based solder. The shape of the solder particles is formed into 10×10×0.1 (mm), the solder particles are sandwiched between the semiconductor element and the substrate, and the temperature is above 235°C in a hydrogen-nitrogen mixed gas atmosphere with an oxygen concentration of 50ppm. Heating was performed for 3 minutes, the peak temperature was 280° C., and reflux was performed with a total reflux time of 15 minutes. The thickness and metal composition of the protective film formed on the surface were measured by xps. Furthermore, the porosity was measured by observing the voids in the die-bonded portion through an X-ray apparatus.

[0025] Tables 1-3 show the solder particle composition, the thickness and metal compo...

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Abstract

A pellet which generates less voids at the time of die bonding a semiconductor element of an electronic component on a board, even it is lead-free. In the pellet, on a surface of a lead-free solder alloy having Sn as a major ingredient, a transparent and colorless Sn-based protecting film, including an O of 30-50at% and a P of 5-15at%, or that including an In of 10-30at%, an O of 40-60at% and a P of 5-15at%, is formed when heated for soldering. The pellet has a thickness of 0.05-1mm and has a shape substantially the same as that of the board.

Description

technical field [0001] The present invention relates to solder pellets for bonding a semiconductor element and a substrate of an electronic component, and an electronic component for bonding a semiconductor element and a substrate with a solder. Background technique [0002] For high-performance electronic components such as BGA and CSP, the semiconductor element and the substrate are bonded by bonding material chips. Die bonding refers to a process of fixing a semiconductor element obtained by dicing a silicon wafer to a substrate of an electronic component. For die-bonded semiconductor elements and substrates, when electronic equipment is used, heat is generated from the semiconductor elements, and the performance of the semiconductor itself may be deteriorated or thermally damaged due to thermal influence. freed. In addition, the die-bonding joint is also used for grounding from the semiconductor element. Adhesive resins or solders are generally used as bonding materia...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/52B23K35/26B23K35/02H01L21/60
CPCH01L24/29H01L24/27H01L2924/0133H01L2924/01047H01L24/83H01L2924/014H01L2924/0105H01L2924/01029H01L2924/01051H01L2224/29109H01L2224/29298H01L2924/0132H01L2924/01033H01L2924/01082H01L2224/29111B23K35/262H01L2924/01049H01L2924/01004H01L2224/83801H01L2224/29101H01L2924/01015B23K35/0244H01L2924/01006H01L2924/01032H01L2924/01078H01L2924/00013H01L2924/01042H01L2224/29H01L2924/01024H01L2924/15747H01L2924/00H01L2924/01028H01L2924/01083H01L2924/3512H01L2924/00015H01L2924/00014H01L2224/29099H01L2224/29199H01L2224/29299H01L2224/2929
Inventor 上岛稔
Owner SENJU METAL IND CO LTD