Device and method for testing in-situ mechanical property of single nano-wire in scanning electron microscope

Abstract

The invention relates to the measurement device and method of the scanning electron microscope single nanometer line original force comprehensive property. It designs the rough adjusting displacement platform, ceraminator and micro cantilever beam dynamic inspection system to realize the nanometer line elasticity, with quantitative measure of the dynamic feature of the plastic and fraction process, together with the nanometer line electrical feature measurement. It scans the elastoplastic deformation, fracture failure method and electric charge transmission feature, matching the nanometer line dynamic feature, electrical feature, dynamic and electrical coupling feature, and other microstructure change, revealing the composite performance of the one dimension nanometer line. It is easy, convenient for operation, extensive in use, with intuitionistic and quantitative measurement feature.

Description

Technical field: [0001] The invention relates to a device installed in a scanning electron microscope to measure the in-situ mechanical properties of a single nanowire, and to perform electrical measurement under the action of tensile stress. The scanning electron microscope can be used to observe in real time the process of nanowire stretching and deformation Structural changes, revealing the deformation mechanism of a single nanowire under uniaxial tensile stress and the electrical properties under stress state, belong to the field of in-situ detection of nanomaterial properties. Background technique: [0002] Realizing the manipulation and in-situ performance measurement of single nanostructures is a key scientific and technological issue that is the bottleneck in the research of new nanostructures, new properties and new devices. [0003] It should be pointed out that although people have conducted in-depth studies on the mechanical and electrical properties of monomeric...

AI Technical Summary

Problems solved by technology

This method avoids the difficulty of direct manipulation of nanowires, and at the same time, the structural information of nanotubes / wires can be obtained in situ using transmission electron microscopy, but this method is limited to the range of elastic deformation of nanowires, and cannot measure plastic deformation of nanowires. Other important mechanical properties such as breaking strength

[0007] None of the above methods can measure the electrical properties of a single nanowire under stress, and can no longer meet the current requirements for testing the mechanical properties, electrical properties, and mechanical-electrical coupling properties of nanomaterials on the microscopic scale.

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