Device and method for testing in-situ mechanical property of single nano-wire in scanning electron microscope

A comprehensive performance testing, scanning electron microscope technology, used in measuring devices, using stable tension/pressure testing material strength, scientific instruments, etc., can solve the problem of inability to measure nanowire plastic deformation, fracture strength Measurement of wire electrical properties, inability to meet the problems of nanomaterials, etc., to achieve the effect of easy interpretation and discovery, rich physical properties, and a wide range of applications

Inactive Publication Date: 2007-07-11
BEIJING UNIV OF TECH
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Problems solved by technology

This method avoids the difficulty of direct manipulation of nanowires, and at the same time, the structural information of nanotubes/wires can be obtained in situ using transmission electron microscopy, but this method is limited to the range of elastic deformation of nanowires, and cannot measure plastic deformation of nanowires. Other important

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  • Device and method for testing in-situ mechanical property of single nano-wire in scanning electron microscope
  • Device and method for testing in-situ mechanical property of single nano-wire in scanning electron microscope
  • Device and method for testing in-situ mechanical property of single nano-wire in scanning electron microscope

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[0029] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0030] The in-situ mechanical and electrical comprehensive test device for a single nanowire in the scanning electron microscope is designed according to the FEI Quanta200 environmental scanning electron microscope. The micro-cantilever is made of silicon material, the size is 350μm×50μm×2μm, the corresponding elastic constant is K=0.35N / m, and the bending deformation is detected by laser displacement detector, and the load accuracy can be obtained as 1nm. First place the stretching device under the optical microscope, adjust the magnification and the best focal length of the optical microscope, and use a micrometer to adjust under the microscope observation, so that the sample stage is close to the micro-cantilever beam and kept within a few microns, and then use a tight Fasten the screws. The prepared nanowires are ultrasonically dispersed i...

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Abstract

The invention relates to the measurement device and method of the scanning electron microscope single nanometer line original force comprehensive property. It designs the rough adjusting displacement platform, ceraminator and micro cantilever beam dynamic inspection system to realize the nanometer line elasticity, with quantitative measure of the dynamic feature of the plastic and fraction process, together with the nanometer line electrical feature measurement. It scans the elastoplastic deformation, fracture failure method and electric charge transmission feature, matching the nanometer line dynamic feature, electrical feature, dynamic and electrical coupling feature, and other microstructure change, revealing the composite performance of the one dimension nanometer line. It is easy, convenient for operation, extensive in use, with intuitionistic and quantitative measurement feature.

Description

Technical field: [0001] The invention relates to a device installed in a scanning electron microscope to measure the in-situ mechanical properties of a single nanowire, and to perform electrical measurement under the action of tensile stress. The scanning electron microscope can be used to observe in real time the process of nanowire stretching and deformation Structural changes, revealing the deformation mechanism of a single nanowire under uniaxial tensile stress and the electrical properties under stress state, belong to the field of in-situ detection of nanomaterial properties. Background technique: [0002] Realizing the manipulation and in-situ performance measurement of single nanostructures is a key scientific and technological issue that is the bottleneck in the research of new nanostructures, new properties and new devices. [0003] It should be pointed out that although people have conducted in-depth studies on the mechanical and electrical properties of monomeric...

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Application Information

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IPC IPC(8): G01N3/08G01N13/10
Inventor 韩晓东张跃飞张泽
Owner BEIJING UNIV OF TECH
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