Method of anisotropic etching of substrates

Abstract

A method of plasma etching of silicon that utilizes the plasma to provide laterally defined recess structures through a mask. The method is based on the variation of the plasma parameters to provide a well-controlled anisotropic etch, while achieving a very high etch rate, and a high selectivity with respect to a mask. A mixed gas is introduced into the vacuum chamber after the chamber is evacuated, and plasma is generated within the chamber. The substrate's surface is exposed to the plasma. Power sources are used for formation of the plasma discharge. An integrated control system is used to modulate the plasma discharge power and substrate polarization voltage levels.

Description

[0001] 1. Field of the Invention[0002] The invention relates to a method of anisotropic plasma etching of substrates preferably defined with an etching mask in which the etch rate and selectivity is increased. The method can be well implemented for manufacturing microelectromechanical system (MEMS), as well as microelectronic devices.[0003] 2. Background of the Related Art[0004] Anisotropic plasma etching, particularly for single crystal silicon, can work independent of crystal orientation of the substrate or doping level. This method also applies to doped or undoped polysilicon. Preferred fields of applications are MEMS technology, where structures have a high aspect ratio, i.e., a high structural height to width ratio. Other examples include surface wave technology, where narrow grooves and vertical walls are etched to produce actuators, surface wave filters, delay lines, etc. Additional microelectronics applications include storage cells, insulation, collector contacts, etc.[0005...

AI Technical Summary

Benefits of technology

[0019] The method used in this invention enables the substrate to be etched without using helium gas as a cooling medium. This is because lower power is used to excite the etching gas resulting in less heat being generated during the process.

[0020] A further advantage of this invention is that a constant flow of mixed gas is injected into the process chamber during processing, resulting in a process that is more stable and repeatable.

Problems solved by technology

Problems occur when, to increase the speed of silicon removal (i.e., the etch rate), one tries to enhance the plasma density by increasing the power coupled to the plasma discharge.

However, as the power is increased more hot ions are produced and the direction of ion movement becomes more random.

The results is that more ions and radicals are depleted by the walls of the trenches, with the inevitable loss of anisotropy of the etch.

To overcome this problem, one must reduce the etch rate, resulting in the loss of the throughput.

An additional problem encountered is mask degradation.

As etch rate is reduced, etch time, and therefore mask exposure time, are increased, leading to more rapid mask degradation, i.e., reduced selectivity.

The problem with cycling different gases is that the time ratio of the etch deposition cycle depends on the speed of the gas mixtures and varies from point to point, affecting the uniformity.

Also, this method typically requires more complex hardware and controls to introduce the two different gas mixtures in cycles.

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