Metal Covered Polyimide Composite, Process for Producing the Composite, and Apparatus for Producing the Composite
a technology of metal covering and composites, applied in the direction of superimposed coating process, liquid/solution decomposition chemical coating, transportation and packaging, etc., can solve the problems of kirkendall voids (air gaps) generated, peeling of tin plated layers, and inability to say that the foregoing method is sufficient to solve problems, etc., to achieve effective peeling prevention, effective inhibition of peeling, and superior
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example 1
[0086]There is no particular limitation in the material used as the polyimide film. For instance, Upilex by Ube Industries, Kapton by DuPont-Toray, Apical by Kaneka are commercially available, and any one of these polyimide films can be applied in the present invention. The present invention is not limited to this kind of specific variety. In the Examples and Comparative Examples Upilex-SGA by Ube Industries is used as the polyimide film.
[0087]Foremost, the polyimide film was placed in a vacuum apparatus and, after evacuation, the polyimide film was subject to surface modification treatment using plasma.
[0088]Next, a tie-coat layer (Ni-20 wt % Cr) of 25 nm was formed on the foregoing polyimide film surface subject to the plasma treatment by way of sputtering.
[0089]Subsequently, a metal seed layer (copper layer) of 300 nm was formed by sputtering.
[0090]This can also be formed by electroless plating, but sputtering was performed in the Examples.
[0091]Then, the drum-based two bath-type...
example 2
[0100]Next, as with Example 1, the drum-based two bath-type electroplating apparatus shown in FIG. 1 was used to form the copper plated layer wherein, in order to reduce the number of zones, in Cell A, zone 3 and zone 4 were electrically connected, and the distance L between zone 3 and zone 4 was adjusted to be approximately ½ of the distance d between the anode and the plating object in order to form the copper plated layer; and, in Cell B, zone 7 and zone 8 were electrically connected, and the distance L between zone 7 and zone 8 was adjusted to be approximately ½ of the distance d between the anode and the plating object.
[0101]As a result of forming the copper layer, as described above, only a slight plated layer was formed in zone 1 and zone 2 of Cell A. Moreover, no plated layer was formed in zone 5 and zone 6 of Cell B. The results were the same as Example 1.
[0102]Consequently, the copper layer was mainly formed in zone 3, zone 4, and zone 7+zone 8. The results are shown in Ta...
example 3
[0110]Next, in addition to the plating conditions of Example 2, the copper plated layer was formed upon turning off the current of zone 1 and zone 2. In turning off the current of zone 1 and zone 2, dummy anodes prepared with an insulating material in the same shape was disposed in place of the normal anodes in zone 1 and zone 2.
[0111]As a result of forming the copper layer, in Cell A, a plated layer was not formed in zone 1 and zone 2. In addition, in Cell B also, a plated layer was not formed in zone 5 and zone 6.
[0112]Consequently, a copper layer was formed in zone 3+zone 4, and zone 7+zone 8. The results are shown in Table 3. As shown in Table 3, a copper plated layer of 4.25 μm was formed in zone 3+zone 4, and that of 4.25 μm in zone 7+zone 8.
[0113]By way of reference, it was 0 μm in zone 1 and zone 2 and 0 μm in zone 5 and zone 6.
TABLE 3Zone123 + 4567 + 8Thickness0.000.004.250.000.004.25Thickness: Plating thickness (μm) per zone
[0114]The cross section of the copper layer obtai...
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