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84 results about "Optical absorption coefficient" patented technology

Solid-state image capturing apparatus, method for manufacturing the same, and electronic information device

A solid-state image capturing apparatus is manufactured, which has a high sensitivity and high resolution with no color filter or no on-chip microlens required and with no shading generated or no variance in performance between pixel sections. In a solid-state image capturing apparatus 1, a plurality of pixel sections 2 (solid-state image capturing devices), each having light receiving sections 21 to 23 laminated in a depth direction of a semiconductor substrate 3, is repeatedly arranged according to a sequence in a direction along a plane of the semiconductor substrate 3. For incident light, electromagnetic waves having wavelength bands corresponding to the depths of the respective light receiving sections 21 to 23 are detected at the light receiving sections 21 to 23 in accordance with the wavelength dependency of optical absorption coefficient of semiconductor substrate material, and signal charges are generated. The pixel sections 2 are electrically separated from each other by pixel separation section diffusion layers 4. Wiring layers 71 to 73, which forms transfer paths for transferring signal charges from the light receiving sections 21 to 23, and the required number of transistors 5 are provided on the surface of the semiconductor substrate 3, which is the opposite side of the electromagnetic wave incidence side.
Owner:SHARP KK

Pellicle and method for manufacturing the same

The present invention relates to a pellicle. It is therefore an object of the present invention to provide a pellicle provided with a practical pellicle film for EUV superior in transmittance and chemical stability. A pellicle of the present invention is provided with a silicon crystal film, the absorption coefficient of which is 0.005/nm or lower with respect to light having a wavelength of 13.5 nm, as a pellicle film. The silicon crystal film is an indirect transition type semiconductor film and, therefore, the optical absorption coefficient thereof is relatively low. In particular, a single-crystal silicon film has a lower absorption coefficient than an amorphous silicon film and a polysilicon film. Thus, it is easy to obtain desired transmissivity required of a pellicle film for EUV from the single-crystal silicon film. Such a pellicle film as described above can be fabricated from an SOI film obtained by thin-filming an SOI substrate (including an SOQ substrate and an SOG substrate). If a pellicle film of the silicon crystal film is made from the SOI film, no excessive stress is subjected in the pellicle film formation process, and the pellicle film is formed under room temperature without causing strains.
Owner:SHIN ETSU CHEM IND CO LTD

Device for measuring optical absorption coefficient of large-caliber crystalline material

The invention provides a device for measuring an optical absorption coefficient of a large-caliber crystalline material. According to the measurement device, stable collimated laser beams are formed by utilizing a tunable laser light source and a stable laser power system, the stable laser beams irradiate a measured large-caliber crystal, the perpendicularity between incident laser and the surface of the large-caliber crystal and the perpendicularity between the o-axis or e-axis of the large-caliber crystal and the table board are monitored by utilizing an optical autocollimating method, the laser polarization direction is adjusted and output to be parallel to the o-axis or e-axis of the large-caliber crystal by utilizing a polarizer and an analyzer, a transmission ratio of the o-light or e-light of the large-caliber crystal in a specific polarization state is measured, and a single-point absorption coefficient formula of the crystalline material on o-light or e-light is deduced by utilizing a Beer-Lambert law, so that the absorption coefficient of the large-caliber crystal can be measured, and finally, the large-caliber crystalline material is subjected to scanning and splicing measurement through a high-precision scanning sample platform deck mechanism, and precision measurement of the large-caliber crystalline material on the optical absorption coefficient of the o-light or e-light is realized.
Owner:LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS

Laser multiple reflection photoacoustic spectroscopy technology-based aerosol optical absorption coefficient detection apparatus

The invention provides a laser multiple reflection photoacoustic spectroscopy technology-based aerosol optical absorption coefficient detection apparatus. Laser passes through an optical isolator and an optoacoustic cell and is reflected by a first reflector, reflected laser passes through the optoacoustic cell and the optical isolator and is reflected by a second reflector, newly obtained reflected laser passes through the optical isolator and the optoacoustic cell and is reflected by the first reflector, the reflected laser passes through the optoacoustic cell and the optical isolator and then is output, a lock-in amplifier is connected with a microphone and a signal generator, and an optoacoustic signal is extracted from noises and is counted by a computer to obtain the absorption coefficient of aerosol. A technical problem that the influences of insufficient utilization of laser power on the detection precision of photoacoustic spectroscopy technology-based aerosol optical absorption coefficient detection apparatuses in the prior art is solved in the invention. Multiple reflection of the laser is carried out in the optoacoustic cell, so the laser power in the optoacoustic cell is improved without improving the laser output power; and the sensitivity of the amplitude enhancement detection apparatus of the optoacoustic signal is improved.
Owner:ZHEJIANG MEASUREMENT SCI RES INST
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