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Cleaner composition for treating acid gas and purification method therefor

An acid gas and composition technology, applied in chemical instruments and methods, separation methods, dispersed particle separation, etc., can solve the problems of low adsorption capacity, fire, and high cost, and achieve high adsorption capacity, good adsorption effect, and low cost. Effect

Active Publication Date: 2009-09-23
IND TECH RES INST
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In terms of wet method, JP-61-204022 and JP-62-125827 disclose a kind of wet scrubbing method which utilizes alkaline aqueous solution such as sodium hydroxide to contact with gas to absorb and process acid gas, which has the advantage of low operating cost, but It is easy to break due to blockage or corrosion, and regular inspection is also required. As mentioned above, when the utilization rate of the process is not high, it will cause waste of water and electricity
In terms of dry adsorption, it is mainly to develop various purifiers, fill them in the adsorption barrel, and then let the process tail gas flow through to absorb acid gas; related inventions include JP-60-68051 disclosing a zinc-impregnated compound or Activated carbon of alkali metal compounds is used to treat acid gas. Although this method is low in cost, its adsorption capacity is low and there is a risk of fire; and U.S.5094825 discloses that a purifying agent mainly composed of ferric oxide is used to treat ClF 3 , this method directly uses commercialized products, which is simple to manufacture, but the adsorption capacity is too low; The cost of strontium hydroxide is too high, and there is still room for improvement in the adsorption capacity; and U.S.5756060 (TW 370470) discloses a purifying agent mainly composed of copper oxide and manganese oxide, which is used to treat acid gases containing halogens, but there is also a cost Too high, there is room for improvement in the adsorption capacity

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0060] Weigh an appropriate amount of ferric nitrate (Fe(NO 3 ) 3 9H 2 O), be dissolved in an appropriate amount of deionized water, and add the gamma-aluminum trioxide (gamma-Al 2 o 3 ), and then adjust the pH value of the aqueous solution with sodium hydroxide to precipitate iron in the state of hydroxide, and then dry and heat in the air to make a BET surface area of ​​150m 2 / g detergent composition, add 5% magnesia powder as a plasticizer / promoter, mix thoroughly, add sodium silicate as a binder, heat at 120°C for 2 hours after extrusion molding, then crush and screen Particles with a particle size of 0.425-0.85 mm were used as the cleaning agent composition for testing. The prepared cleanser composition is analyzed by BET method and has a specific surface area of ​​150m 2 / g. The detergent adsorption capacity test was carried out under the same test conditions as in Comparative Example 1, and the test results are shown in Table 1.

Embodiment 2

[0062] Repeat the steps of Example 1 to prepare the cleanser composition, but an appropriate amount of iron nitrate and gamma-aluminum sesquioxide (gamma-Al 2 o 3 )mix. The prepared detergent composition is analyzed by BET method and has a specific surface area of ​​188m 2 / g. The detergent adsorption capacity test was carried out under the same test conditions as in Comparative Example 1, and the test results are shown in Table 1.

[0063] Table 1

[0064]

experiment number

main components BET

(m 2 / g) Adsorption capacity

(kg HCl / kg adsorbent) Comparative example 1 Fe 2 o 3 3.4 0.005 Example 1 Fe / Al=1:1 150 0.46 Example 2 Fe / Al=2:1 188 0.66

[0065] The results shown in Table 1 above show that the cleaning agent compositions of Examples 1 and 2 of the present invention made by adding the active ingredient of the ferric oxide compound of gamma-aluminum oxide are more effective than the known cleaning agen...

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Abstract

The present invention provides a cleanser composition for treating acid gas and a purification method using the same, wherein the cleanser composition includes an iron oxide compound and an oxide compound containing at least one of aluminum, silicon or titanium with a mesopore structure. The purification method is to contact the acid gas to be treated with the cleaning agent composition to reduce the concentration of the acid gas. The cleanser composition prepared by the invention has higher adsorption capacity than the known cleanser only containing iron oxide, and the use of the cleanser composition to purify acid gas has the characteristics of good adsorption effect and low cost.

Description

technical field [0001] The invention relates to a cleanser composition and a purification method using the same, in particular to a cleanser composition for treating acid gas and a purification method using the same. Background technique [0002] Semiconductor manufacturing is a highly sophisticated industry, and some minor environmental or operational changes may affect the quality of its manufactured products. Therefore, the production equipment of semiconductor manufacturing and photovoltaic power plants are all operated in a clean room under strict control. There are oxidation furnace, diffusion furnace, cleaning tank, developer, ion implanter and metal sputtering machine (CVD), etc. These production equipment may generate pollutants during operation. According to their processing properties, air pollutants can be divided into three types: acidic and alkaline gases, organic gases, and special toxic gases. Among them, a large amount of acidic gases are used in the dry et...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B01D53/68
Inventor 许荣男李寿南
Owner IND TECH RES INST