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Method for producing metal oxide film

A technology of oxide film and manufacturing method, which is applied in the direction of oxide/hydroxide preparation, metal material coating process, liquid chemical plating, etc., can solve the problems of unsatisfactory metal and complicated process, and achieve simple process, The effect of simple process and low cost

Inactive Publication Date: 2011-03-02
DAI NIPPON PRINTING CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In these patent documents, although a reducing agent such as dimethylamine borane is used, the catalytic treatment of the substrate is an essential component, and it is not a method of directly forming a metal oxide film on the surface of the substrate.
In addition, depending on the application of the metal oxide film, the metal used in the catalyst is not ideal, and there is a problem that the process is complicated due to the catalyst treatment.

Method used

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  • Method for producing metal oxide film
  • Method for producing metal oxide film
  • Method for producing metal oxide film

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0104]

[0105] A 20wt% solution of alumina particles (manufactured by Micron, particle size 30 μm) was coated on a glass substrate by a bar coating method, and fired at a temperature of 500° C. for 2 hours to obtain a glass substrate provided with a porous alumina particle layer. Glass substrate.

[0106] Then, in 1000 g of an aqueous solution in which indium chloride is 0.03 mol / l and tin chloride is 0.001 mol / l, borane-trimethylamine complex (manufactured by Kanto Chemical Co., Ltd.) is added as a reducing agent to reach 0.1mol / l. In addition, 2 g of sodium chlorate was added to the solution as an auxiliary ion source to obtain a solution for forming a metal oxide film.

[0107] Then, the substrate obtained by the method was immersed in the solution at a temperature of 70° C. for 12 hours. At this time, by circulating the solution for forming a metal oxide film and passing it through a filter, the precipitate and the mixed dust are removed. As a result, a metal oxide f...

Embodiment 2

[0114]

[0115] In this example, evaluation of corrosion resistance was performed by forming a zirconia film on a microfabricated copper substrate.

[0116] First, in this example, copper (0.5 mm thick) microfabricated by etching (hole: 1 mm in diameter, 50 μm in depth, groove: 50 μm in width, 10 mm in length, and 20 μm in depth) was used as a base material.

[0117] Then, to 1000 g of a 0.03 mol / l zirconia nitrate aqueous solution, a borane-dimethylamine complex (manufactured by Kanto Chemical Co., Ltd., type number 04886-35) was added as a reducing agent to make it 0.1 mol / l , and a solution for forming a metal oxide film was obtained.

[0118] Then, the metal oxide film-forming solution was heated to a temperature of 70° C., and air bubbles were generated using a Naflon bubbler (manufactured by Asone Corporation) while keeping the temperature at 70° C. constant. At this time, by circulating the solution for forming a metal oxide film and passing it through a filter, depo...

Embodiment 3

[0126]

[0127] In this example, the purpose was to impart hydrophilicity by forming a titanium film on a microfabricated acrylic substrate.

[0128] First, in this example, an acrylic base material (5 mm thick) subjected to mechanical microfabrication (groove: width 500 μm, length 100 mm, depth 50 μm) was used as a base material.

[0129] Then, in 1000 g of a mixed solution prepared in such a manner that water, isopropyl alcohol (IPA) and toluene reached a ratio of 4:4:1, diisopropoxytitanium bis(ethyl acetoacetate) (manufactured by Matsumoto Pharmaceutical Co., Ltd. ), to make it reach 0.1mol / l, and then, add borane-sulfide dimethyl complex (manufactured by Kanto Chemical Co., Ltd.) as a reducing agent in the solution to make it reach 0.1mol / l, and then add to the solution 1 g of sodium nitrite was added to obtain a solution for forming a metal oxide film.

[0130] Then, the base material was kept at 80° C., and air bubbles were generated using a Naflon bubbler (manufactu...

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Abstract

Disclosed is a method for producing a metal oxide film directly on the surface of a base without catalyzing the base surface. This method enables to produce a uniform metal oxide film by a simple process even when the base has a structured portion. Specifically disclosed is a method for producing a metal oxide film wherein a metal oxide film is obtained by bringing a metal oxide film-forming solution, in which a metal salt or a metal complex is dissolved as the metal source, into contact with the surface of a base. This method for producing a metal oxide film is characterized in that the metal oxide film-forming solution contains a reducing agent.

Description

technical field [0001] The present invention relates to a method for producing a metal oxide film using a solution for forming a metal oxide film containing a reducing agent. Background technique [0002] Conventionally, it is known that metal oxide films exhibit various excellent physical properties, and thus are utilized in a wide range of fields such as transparent conductive films, optical thin films, and electrolytes for fuel cells, by making effective use of these properties. As the manufacturing method of this kind of metal oxide film, for example, sol-gel method, sputtering method, CVD method, PVD method, printing method, etc. can be mentioned, but because these methods all need firing or high vacuum state, so make the device There are problems such as high cost and complicated operability due to large-scale. [0003] In addition, as another problem of the method of producing a metal oxide film, it is difficult to provide a uniform metal oxide film on a substrate ha...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C01B13/14C23C18/16
CPCC23C18/31C04B2235/3286C04B35/486C04B2235/3227C23C18/1682C23C18/1667C04B2235/449C03C17/3411C04B2235/444C04B35/50C23C18/166C03C17/25C03C2218/11C04B35/46C04B2235/3229C23C18/1676C04B35/632C23C18/14C04B2235/445C03C2217/948C23C18/143C23C18/16
Inventor 小堀裕之大川晃次郎野村圭介
Owner DAI NIPPON PRINTING CO LTD
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