Semiconductor device and its making method
A manufacturing method and semiconductor technology, which can be used in the manufacture of semiconductor/solid-state devices, semiconductor devices, semiconductor/solid-state device components, etc., can solve problems such as poor adhesion and peeling, and achieve the effect of reducing corrosion and damage and increasing adhesion.
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[0043] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and understandable, the specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings.
[0044] 3 is a cross-sectional view of the structure of the semiconductor device of the present invention. As shown in FIG. 3, the semiconductor device of the present invention includes a substrate 100 and a metal pattern layer 110 formed in a dielectric layer 105 on the substrate 100. The metal pattern layer 110 is spin-coated on the dielectric layer 105 by photoresist. Photoresist is formed by exposure, development and etching. An etch stop layer 120 is formed on the dielectric layer 105 and the metal pattern layer 110 with a thickness of 100 angstroms to 300 angstroms. The material can be silicon oxide, silicon carbide (SiC), silicon nitride (SiN), carbon nitride Oxygen compound (SiOC), one or a combination of nitroge...
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