Process for preparing ordered porous aluminum oxide thin film

A porous alumina and thin film technology, applied in the field of materials, can solve problems such as oxide film breakdown, and achieve the effects of controllable pore spacing, low cost, and fast growth speed

Inactive Publication Date: 2008-01-16
SHANGHAI JIAO TONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, in order to avoid oxide film breakdown, the oxidation process must be kept at a low temperature (less tha...

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0019] This embodiment 1 is implemented under the following conditions of implementation and technical requirements:

[0020] The first is to electropolish 99.999% high-purity aluminum foil in a mixed solution of perchloric acid and ethanol to achieve a mirror effect.

[0021] Followed by pre-oxidation, the oxidation condition is to use water and ethanol as the solvent (volume ratio of 4:1) 0.3M oxalic acid solution as the electrolyte, oxidize at 40V for 10 minutes, and the temperature is controlled at 10°C. Stir constantly.

[0022] The third is to change the oxidation voltage, and the other electrolysis conditions remain unchanged. Oxidation voltage at 2V s -1 The speed is gradually increased to the set voltage of 130V, and the oxidation is carried out at a constant voltage for one hour.

[0023] The last is to use saturated SnCl 4 solution to remove aluminum substrates. Immersion of porous alumina film with Al substrate in saturated SnCl 4 solution until the aluminum ...

Embodiment 2

[0026] This embodiment 2 is implemented under the following conditions of implementation and technical requirements:

[0027] The first is to electropolish 99.999% high-purity aluminum foil in a mixed solution of perchloric acid and ethanol to achieve a mirror effect.

[0028] The second is to carry out pre-oxidation. The oxidation condition is to use water and ethanol as the solvent (volume ratio is 3:1) 0.3M oxalic acid solution as the electrolyte, oxidize at 40V for 5 minutes, and the temperature is controlled at 0 ° C. During this process Stir constantly.

[0029] The third is to change the oxidation voltage, and the other electrolysis conditions remain unchanged. Oxidation voltage at 0.3V s -1 The speed is gradually increased to the set voltage of 120V, and the oxidation is carried out for one hour at a constant voltage.

[0030] The last is to use saturated SnCl 4 solution to remove aluminum substrates. Immersion of porous alumina film with Al substrate in saturated...

Embodiment 3

[0033] This embodiment 3 is implemented under the following conditions of implementation and technical requirements:

[0034] The first is to electropolish 99.999% high-purity aluminum foil in a mixed solution of perchloric acid and ethanol to achieve a mirror effect.

[0035] Followed by pre-oxidation, the oxidation conditions are 0.3M oxalic acid, water and ethanol electrolyte (the volume ratio of water and ethanol is 5:1), 40V electrolysis voltage, temperature control at 5 ° C, oxidation for 7 minutes, non-stop during oxidation Stir.

[0036] The third is to change the oxidation voltage, and the other electrolysis conditions remain unchanged. Oxidation voltage at 1V s -1 The speed is gradually increased to the set voltage of 150V, and the oxidation is carried out for one hour at a constant voltage.

[0037] The last is to use saturated SnCl 4 solution to remove aluminum substrates. Immersion of porous alumina film with Al substrate in saturated SnCl 4 In the solution,...

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Abstract

The invention provides a preparation method in the field of material technology, specifically a preparation method of ordered porous aluminum oxide film. The preparation method comprises: firstly, electrolytically polishing an aluminum sheet; then, pre-oxidizing for a certain period of time under a low voltage and raising the oxidation voltage to a predetermined value and oxidizing for a certain period of time; and finally, selectively eroding the aluminum substrate to facilitate the observation of orderly structure of the bottom of aluminum oxide film. By the pre-oxidation under low voltage and the addition of ethanol in oxalic acid electrolyte, the oxidation under high voltage can be performed stably without breakdown under enlarged operational conditions. The method can produce highly-ordered porous aluminum oxide film within an extremely-short oxidation period and can control the pore distance in a range from 300nm to 360nm. The inventive method is simple and efficient, and promotes the application of porous aluminum oxide template in the fields of industry and nano material synthesis.

Description

technical field [0001] The invention relates to a preparation method in the technical field of materials, in particular to a preparation method of an ordered porous aluminum oxide film. Background technique [0002] Self-organized porous alumina films have a regular hexagonal close-packed structure and have attracted great attention as templates for the preparation of various functional nanostructured materials. The structural parameters of the prepared porous alumina films, such as the pore spacing and the order of the pore arrangement, directly affect the size and performance characteristics of the synthesized quasi-one-dimensional nanomaterials and assembled nanoarray systems. Therefore, it is of great significance to clarify the formation mechanism of the aluminum oxide film during the preparation process and to control the anodic oxidation conditions purposefully so as to control the structural parameters of the film. The general oxidation method is: after the aluminum...

Claims

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Application Information

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IPC IPC(8): C25D11/04
Inventor 李东栋姜传海李萍任鑫
Owner SHANGHAI JIAO TONG UNIV
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