Method for enhancing chip brightness
A chip and brightness technology, which is applied in the field of improving chip brightness and roughening the surface of the chip substrate to improve the brightness of the chip, so as to achieve the effect of improving the external quantum efficiency, improving the total reflection problem, and improving the light extraction efficiency
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Embodiment 1
[0021] As shown in Figure 3, it is a schematic diagram of making a photonic crystal structure on the surface of the substrate in Example 1, a method for improving the brightness of the chip, the electrodes of the flip chip 8 are bonded to the silicon heat sink chip 9, and it is characterized in that Make photonic crystal on the surface 11 of the sapphire substrate 10 of packing welding chip 8, its method is:
[0022] (1) First paste a layer of 0.2 micron-0.8 micron thick silicon dioxide or silicon nitride protective film layer on the surface 11 of the sapphire substrate 10 of the flip chip 8;
[0023] (2) coating photoresist on protective film layer then, photoresist is exposed with laser exposure machine;
[0024] (3) Under the protection of the photoresist, the silicon dioxide or silicon nitride protective film layer is etched by an inductively coupled reactive ion etching machine using chlorine gas to form a photonic crystal structure 13 on the surface of the sapphire subst...
Embodiment 2
[0027] As shown in Figure 4, for embodiment 2, make photonic crystal structure schematic diagram on substrate surface and transparent electrode surface, make photonic crystal simultaneously on the surface 11 of the sapphire substrate 10 of flip chip 8 and on the surface of transparent electrode 12 Structure, using steps 1, 2 and 3 to form a photonic crystal structure on the surface 11 of the sapphire substrate 10:
[0028] First, apply a photoresist on the surface of the transparent electrode indium tin oxide (ITO) 12 of the flip chip 9, and use a laser exposure machine (Nano Engineering Optical System) to expose the photoresist, and after development, the photoresist is obtained as shown in Figure 5 Or pattern as shown in Figure 6; Under the protection of photoresist, etch transparent electrode indium tin oxide (ITO) 12 by inductively coupled reactive ion etching machine (ICP-RIE), obtain photonic crystal as shown in Figure 5 or As shown in Figure 6. The effect of forming a ...
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