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Oxide sintering body, its manufacturing method, transparent conductive film, and solar energy cell obtained by using the same

A transparent conductive film and solar cell technology, applied to the conductive layer on the insulating carrier, circuit, photovoltaic power generation, etc., can solve the problems of abnormal discharge disappearance, etc., and achieve high productivity, high energy conversion efficiency, and high transmittance Effect

Active Publication Date: 2008-04-23
SUMITOMO METAL MINING CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In such a GZO target to which a third element such as Al is added, the abnormal discharge as described in Patent Document 4 can certainly be reduced, but the abnormal discharge cannot be completely eliminated.

Method used

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  • Oxide sintering body, its manufacturing method, transparent conductive film, and solar energy cell obtained by using the same
  • Oxide sintering body, its manufacturing method, transparent conductive film, and solar energy cell obtained by using the same

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0154]

[0155] An oxide sintered body containing zinc, aluminum, and gallium was produced as follows. As the starting material, use the respective average particle diameter of zinc oxide powder below 1 μm, and the average particle diameter of aluminum oxide powder below 1 μm, and the average particle diameter of gallium oxide powder below 1 μm, the proportion of raw materials according to Al / ( Al+Ga) was mixed so that the atomic ratio was 55 atomic %, and the (Al+Ga) / (Zn+Al+Ga) atomic ratio was 5.2 atomic %. The raw material powder is put into a resin tank together with water, and mixed by wet ball milling. At this time, using hard ZrO 2 balls with a mixing time of 18 hours. After ball milling and mixing, the slurry was taken out, and a dispersant and a binder of polyvinyl alcohol were added. The slurry was placed in a bead mill equipped with zirconia beads having a diameter of 3 mm for a double-pass treatment. The total processing time was 6 hours. The slurry was filt...

Embodiment 2

[0165] An oxide sintered body containing zinc, aluminum, and gallium was produced in the same manner and under the same conditions as in Example 1, except that the mixing pulverization treatment by ball milling of the raw material powder was not performed, and only the bead milling treatment was performed. That is, the types and proportions of raw material powders, bead grinding conditions, molding conditions, and firing conditions were the same as those in Example 1.

[0166] Using the molded body before firing in the same manner as in Example 1, the uniformity of the Al / (Al+Ga) atomic ratio of the mixed raw material powder was evaluated. As a result, the standard deviation σ was 25 atomic %, which was higher before firing. uniformity.

[0167] In addition, after firing, the obtained oxide sintered body was evaluated in the same manner as in Example 1. The end material of the obtained oxide sintered body was pulverized, powder X-ray diffraction measurement was carried out, a...

Embodiment 3

[0178] Except that the ratio of zinc oxide, aluminum oxide, and gallium oxide in the raw material powder is 31 atomic percent according to the Al / (Al+Ga) atomic number ratio, and the (Al+Ga) / (Zn+Al+Ga) atomic number ratio is 5.2 Except for setting the method of atomic %, in accordance with the same procedure and conditions as in Example 1, mixed pulverization treatment by ball milling and glass bead milling, molding and firing were performed to produce an oxide sintered body.

[0179] Using the molded body before firing in the same manner as in Example 1, the uniformity of the Al / (Al+Ga) atomic ratio of the mixed raw material powder was evaluated. As a result, the standard deviation σ was 18 atomic %, which was higher before firing. uniformity.

[0180] In addition, after firing, the obtained oxide sintered body was evaluated in the same manner as in Example 1. The end material of the obtained oxide sintered body was pulverized, powder X-ray diffraction measurement was carrie...

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Abstract

The invention provides an oxide sintered body which takes the zinc oxide as main components and further includes aluminum and gallium, as well as a production method thereof. The invention comprises targets which can produce no abnormal discharge and can form membranes continuously and long-time with spurting method, transparent electric membranes with the advantages of low resistance, high transmission performance and high quality; and solar batteries with a high conversion rate. The oxide sintered body includes zinc, aluminum and gallium, actually consisting of crystal phases of wurtzite zinc oxide phase and spinel lithium manganese oxide phase. The invention is characterized in that (1) the aluminum and the gallium contents (Al+Ga) / (Zn+Al+Ga) of the oxide sintered body are 0.3 to 6.5 atom percentages by atom quantity, and the aluminum and the gallium contents (Al+Ga) / (Zn+Al+Ga) of the oxide sintered body are 30 to 70 atom percentages by atom quantity; (2) the aluminum contents of the spinel lithium manganese oxide phase are 10 to 90 atom percentages by atom quantity.

Description

technical field [0001] The present invention relates to an oxide sintered body, its manufacturing method, a transparent conductive film, and a solar cell obtained using the same. More specifically, to provide an oxide sintered body containing zinc oxide as a main component and further containing aluminum and gallium, and its production method; a target capable of continuous and long-term film formation without abnormal discharge at all by sputtering or ion plating ; and the high-quality transparent conductive film with low resistance and high transmittance obtained by using it; and then adopt its high conversion efficiency solar cell. Background technique [0002] Transparent conductive films with high conductivity and high transmittance in the visible light field are used in solar cells, liquid crystal display elements, and electrodes of various other photosensitive elements, and are also used in other automotive windows, heat reflection films for buildings, Transparent he...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C04B35/453H01L31/18H01L31/0224H01L31/042H01L31/06C23C14/34C04B35/622C04B35/64C23C14/08H01B5/14H01L31/04
CPCC04B2235/5445C23C14/086C04B2235/3284C04B35/453C04B35/6261C23C14/08H01L31/1884C04B2235/3217C04B2235/6567C23C14/3414C04B2235/3286C04B2235/80C04B2235/3222C04B2235/767C04B2235/77C04B2235/6562C04B2235/763C04B2235/786Y02E10/50C03C17/245C04B35/10C23C14/10H01L31/04
Inventor 阿部能之中山德行
Owner SUMITOMO METAL MINING CO LTD
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