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PVD bushing magnetron sputtering technique using bushing before-sputtering negative grid bias in sputtering cabin to clean

A magnetron sputtering and negative bias technology, applied in the field of bearing bush production technology, can solve the problem of limited adhesion strength and achieve the effect of improving adhesion strength

Active Publication Date: 2010-04-21
CHONGQING YUEJIN MACHINERY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The pre-sputtering treatment to remove dirt on the inner surface of the substrate before the bearing bush is installed in the sputtering chamber cannot meet the existing requirements, so that after processing, the adhesion strength between the sputtering layer and the substrate and between the sputtering layer and the sputtering layer is limited

Method used

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  • PVD bushing magnetron sputtering technique using bushing before-sputtering negative grid bias in sputtering cabin to clean
  • PVD bushing magnetron sputtering technique using bushing before-sputtering negative grid bias in sputtering cabin to clean

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0021] like figure 1 As shown, through the PVD bearing bush magnetron sputtering process of negative bias cleaning before sputtering the bearing bush in the sputtering cabin, the conventional method of producing PVD bearing bushes is firstly used outside the cabin through chemical degreasing, pickling, electrolytic degreasing, ultrasonic cleaning, and treatment. Groove, crane, oven, rectifier, control subsystem, etc. are pre-sputtered, the bearing is installed on the fixture in the magnetron sputtering chamber, the magnetron sputtering chamber is vacuumed, the bearing is cleaned by negative bias before sputtering, and the PVD bearing substrate 1 In the vacuumized sputtering chamber, a stainless steel target is used to energize the PVD bearing substrate 1, the voltage of the PVD bearing substrate 1 is -1600 volts; the current of the PVD bearing substrate 1 is 2.5 amperes; the processing time is 3 minutes. The first diffusion layer 3 is sputtered by magnetron, the PVD bearing su...

Embodiment 2

[0032] like figure 1 As shown, the PVD bearing bush magnetron sputtering process through the negative bias cleaning of the bearing bush in the sputtering chamber, the negative bias cleaning process conditions of the bearing bush before sputtering: the voltage of the PVD bearing substrate 1 is -300 volts; the current of the PVD bearing substrate 1 is 0.4 ampere; treatment time is 40 minutes; magnetron sputtering first diffusion layer 3 process conditions: PVD bearing substrate negative bias voltage is -300 volts; PVD bearing bush substrate current is 0.5 ampere; nickel target negative voltage is -620 volts; The target current is 1 ampere; the treatment time is 40 minutes; finally the weight percent of each component of the first diffusion layer 3 is as follows: Cu 5%; CuPb 5%; CuPbSn 5%; CuPbSn 10%; CuNi 10%; CuPbSnNi 15%; CuPbNi Surplus: first diffusion layer 3 thickness 0.5um, the processing condition of described magnetron sputtering second diffusion layer 5: adopt the aluminu...

Embodiment 3

[0035] like figure 1 As shown, the PVD bearing bush magnetron sputtering process through the negative bias cleaning of the bearing bush before sputtering in the sputtering chamber, the negative bias cleaning process conditions of the bearing bush before sputtering: the voltage of the PVD bearing substrate 1 is -750 volts; the current of the PVD bearing substrate 1 is 1.5 amperes; treatment time is 40 minutes; magnetron sputtering first diffusion layer 3 process conditions: PVD bearing substrate negative bias voltage is -1000 volts; PVD bearing substrate substrate current is 1.2 amperes; nickel target negative voltage is -400 volts; The target current is 0.6 ampere; processing time: 23 minutes; finally the weight percent of each component of the first diffusion layer 3 is as follows: Cu 2.5%; CuPb 3.5%; CuPbSn 7.5%; CuPbSn 7.5%; CuNi 20%; CuPbSnNi 9%; Amount; first diffusion layer 3 thickness 1um, the process condition of described magnetron sputtering second diffusion layer 5:...

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Abstract

The invention discloses a process for cleaning physical vapor deposition bearing magnetron sputtering through minus bias before sputtering in a sputtering chamber, which comprises treatment before sputtering, bearing loading fixture, vacuum pumping, sputtering Ni gate layer, a sputtering AlSnCu friction reducing layer and testing size and shape. The keys are that after the sputtering chamber is vacuumized, the bearing is cleaned through the minus bias before sputtering, a magnetron sputtering first diffusion layer is added between the minus bias before sputtering cleaning and the physical vapor deposition bearing magnetron sputtering Ni gate layer, after the sputtering Ni gate layer, and a second diffusion layer is added before the sputtering AlSnCu friction reducing layer and the magnetron sputtering. The invention cleans the inner surface of the physical vapor deposition bearing through the minus bias, thereby improving the adhesion strength between a physical vapor deposition bearing sputtering film layer and a base. Through the method of magnetron sputtering diffusion layer, and through the metal structure and a mechanical interlock structure of the diffusion layer, the adhesion strength between the sputtering layer and the base and the sputtering layers are improved.

Description

technical field [0001] The invention belongs to the production process of bearing pads, in particular, it relates to a production process of bearing pads which cleans the inner surface of bearing pads by negative bias voltage before splashing. Background technique [0002] The bearing bush is a key moving part of the heart of a diesel engine, and it is also a basic part and a consumable part. [0003] As heart-moving parts, they are the key moving parts that determine the performance and reliability of diesel engines. [0004] As basic components, they play a very important role in supporting the diesel engine. [0005] Failure of the bearing pad in use will directly lead to serious consequences such as deformation or rupture of the main engine cylinder. [0006] Since the bearing bush is a consumable and is located at the heart, the diesel engine needs to be disassembled or partially disassembled when replacing it, which is labor-intensive and time-consuming. If a malfun...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/35
Inventor 冀庆康吴文俊张永红
Owner CHONGQING YUEJIN MACHINERY