Silicon based piezoelectricity cantilever beam minitype electric generating apparatus

Abstract

The inventive silicon based piezo-electricity socle girder miniature power supply device, pertains to the micro-energy sources field in the electronic technology Micro Electro-Me-chanical Systems field. A silicon based piezo-electricity socle girder miniature electric generating apparatus is provided with a silica fixing frame, an oxidizing layer, a platinum / titanium lower metallic layer, a piezo-electricity PZT layer, a platinum / titanium upper metallic layer, an electrode insulation protection layer, and a vibrating base; the structure of the silica fixing frame combines the monocrystal silicon wet method etching and dry-etching to process, whose structure is integrated as a whole, and the center part of the structure is in a socle girder shape, which includes a silicium socle girder and a free end mass block; the piezo-electricity power supply device uses a micro-machining technique to integrally machine, and can realize the integration of the power supply and the microelectronic devices. The service-life of the power supply is long, the structure is simple, and the power supply is environmental protective and energy-saving, which can realize the multi-point disposition of wireless sensing network, without incessant replacement of power supply.

Description

technical field [0001] The invention discloses a silicon-based piezoelectric cantilever micro power generation device, which belongs to the field of micro-energy in the field of electronic technology and micro-electro-mechanical systems. Background technique [0002] Since the birth of the world's first transistor to the present, the field of microelectronics technology has been developing rapidly at the speed of Moore's Law. Since the research in the field of micro-electromechanical systems at the end of the last century, the volume and The quality is shrinking rapidly, but the development of micro-energy technology as energy supply has been relatively slow. Micro-energy has become a technical bottleneck in the development of miniaturization. At present, the widely used micro-energy power supply is mainly chemical batteries, such as lithium batteries, nickel-cadmium batteries, nickel-zinc batteries, etc. Although they can be recharged and used multiple times, their energy d...

AI Technical Summary

Problems solved by technology

At present, micro solar cells, fuel cells, and nuclear isotope cells are in the development stage. The above three types of batteries have many advantages, but there are also obvious limitations in the scope of use. For example, solar cells must be exposed to sunlight to generate electrical energy output. Fuel cells require constant refueling and have water vapor emissions, and nuclear isotope battery safety issues have always limited their use in civilian electronic devices

Williams proposed a common theoretical model for three conversion forms, but did not propose a suitable piezoelectric conversion device. This patent has produced a feasible miniature piezoelectric power generation device

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