Metal semiconductor composite ultra-distinguish film and preparation method thereof

Abstract

The invention relates to a metal semiconductor composite super resolution film and a preparation method thereof. The film is a metal semiconductor composite film formed by depositing metal argent, aurum, platinum or palladium and semiconductor on a substrate by a magnetron sputtering method; the film is provided with a nanometer microstructure formed by metal nanometer particles or clusters irregularly distributed on the semiconductor silicon substrate or the surface of the substrate; the components of the nanometer metal particles is argent, aurum, platinum or palladium; the dimension of the metal particles or clusters is 5 nm to 100 nm. The structure of the invention can make full use of plasma reinforcement effect on local surface produced by the metal particles and the optical nonlinear effect of the semiconductor silicon, read an information point less than an optical diffraction limit and achieve the effect of super resolution. In addition, the super resolution film for optical storage also has the advantages of simple preparation method, rapid response time, good read-out stability, strong signals, etc.

Description

technical field [0001] The invention relates to optical storage, in particular to a metal-semiconductor composite super-resolution film and a preparation method thereof which can reduce the read-write spot size on a recording layer and are applied to an optical disc. Background technique [0002] With the development of the information age, especially the development and popularization of digital high-definition film and television technology and network technology, CD memory is required to have higher storage density and capacity. The most direct way to increase storage density and capacity is to reduce the recording point size. However, the minimum recording point size depends on the optical resolution of the optical disc storage system. Therefore, people often increase the resolution of the optical system by reducing the laser wavelength and increasing the numerical aperture of the optical head objective lens. In the former case, due to the difficulty in developing short...

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Problems solved by technology

[0005] (1) While reducing the effective size of the focused spot, it will cause the attenuation of the energy of the focused spot. Therefore, a higher readout laser power is often required, which affects the life of the laser. At the same time, the high temperature in the irradiation will damage the film and substrate. disk, shorten the life of the disk;

[0006] (2) The super-resolution mechanism of super-resolution mask materials is the phase change of materials caused by laser thermal action, and the response of optical signals is slow, which affects the read and write speed of optical discs;

[0007] (3) The stability of the mask needs to be improved, and the number of cyclic readouts needs to be increased

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