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Photon crystal grating on the top of a dual-color infrared quantum well detector

A photonic crystal, two-dimensional photonic crystal technology, applied in the directions of diffraction grating, optics, instruments, etc., to achieve the effect of easy preparation, realization of grating production, and simple structure

Active Publication Date: 2010-07-21
INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0011] In view of this, the main purpose of the present invention is to provide a photonic crystal grating structure at the top of the two-color infrared quantum well focal plane detector, to solve the design and manufacture problems of the top grating of the two-color infrared quantum well focal plane detector, and to achieve simultaneous detection of two The purpose of higher coupling efficiency in a detected band

Method used

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  • Photon crystal grating on the top of a dual-color infrared quantum well detector
  • Photon crystal grating on the top of a dual-color infrared quantum well detector
  • Photon crystal grating on the top of a dual-color infrared quantum well detector

Examples

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Embodiment 1

[0040] In this example, the working point of the two-color quantum well infrared detector is 5 μm in medium wave / 8 μm in long wave. In this example, a two-color pixel overlapping quantum well detector is used as the photoelectric conversion unit. The medium-wave absorption region and the long-wave absorption region adopt AlGaAs / GaAs quantum well structures with different Al components, and the vertical distance between the two absorption regions is d ' = about 1 μm. According to Figure 4(a), it can be seen that under the condition of incident wavelength λ=5 μm and λ=8 μm, the normalized coupling efficiency of Λ photonic crystal gratings with different periods, the left half of the figure corresponds to the coupling efficiency of λ=5 μm, and the right half Corresponding to the coupling efficiency of λ=8 μm, they all have higher coupling efficiency around the period Λ=3 μm. In the legend, d represents the distance from the horizontal section in the quantum well absorption regio...

Embodiment 2

[0044] In this example, the working points of the two-color quantum well infrared detectors are all at the long-wave 8 μm / 12 μm. It is only necessary to adjust the structural parameters to a triangular lattice photonic crystal structure with circular holes with a period Λ=4.6 μm, a duty ratio of r / Λ=0.35, and a depth h=0.7 μm as a grating, and other parameters remain the same as in Example 1. Just change, its result is similar to embodiment 1, specifically can refer to accompanying drawing 4 (b).

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Abstract

The invention relates to the technical field of a semiconductor opto-electronic device, which discloses a photon crystal grating which is arranged on the top of a two-color infrared quantum well detector, wherein the photon crystal grating comprises a one-dimensional and a two-dimensional photon crystal structures and a metallic cover layer, wherein the two-dimensional photon crystal structure adopts a round hole or an elliptical hole which is etched on a semiconductor material on the top of the two-color semiconductor quantum well detector, and a material which the same with that of the metallic cover on the top is filled in the hole, and the metallic cover layer covers on the two-dimensional photon crystal structure. With the invention, the preparation technique of an infrared focal plane is simplified, and the coupling efficiency of two wave ranges is improved.

Description

technical field [0001] The invention relates to the technical field of semiconductor optoelectronic devices, in particular to a photonic crystal grating on the top of a double-color infrared quantum well detector. Background technique [0002] Quantum well infrared detector is the key device of infrared technology, especially the two-color quantum well infrared detector, which has become one of the focuses of detector research in recent years. The integrated large-area and low-cost infrared focal plane staring system is widely used in Military, meteorological, aerospace, medical and other technical fields. [0003] The principle of the quantum well infrared detector is to use semiconductor materials with different band gaps to grow alternately to form a quantum well structure, and use the subband transition of the quantum well to realize photoelectric absorption conversion. According to the selection rule of the quantum well subband transition, only the light wave whose ele...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L31/0232G02F1/35G02B5/18
Inventor 郑婉华王科任刚杜晓宇邢名欣陈良惠
Owner INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI