Organic metal compound supply container

An organometallic and compound technology, applied in metal material coating process, gaseous chemical plating, semiconductor/solid-state device manufacturing, etc. the reducing effect of

Inactive Publication Date: 2009-03-04
SUMITOMO CHEM CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] However, the supply container described in Patent Document 1 has the following problem: Although the vaporization amount of the organometallic compound is obtained with a certain reproducibility, in order to improve the efficiency of vapor phase growth, the flow rate of the carrier gas is increased and the vaporization of the organometallic compound is increased. When the amount is reduced, the utilization rate of the filled organometallic compound decreases, that is, when the gas containing a certain concentration of organometallic compound cannot be obtained, the remaining organometallic compound in the supply container increases

Method used

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  • Organic metal compound supply container
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Embodiment Construction

[0023] The organometallic compound in the present invention is solid at room temperature, and is used for vapor phase growth, etc., specifically, trimethylindium, dimethylindium chloride, indium adduct, trimethylindium trimethylarsine adduct , Indium compounds such as trimethylindium trimethylphosphine adducts, zinc compounds such as ethyl zinc iodide, ethyl zincocene, zincocene, aluminum compounds such as methyl dichloroaluminum, methyl dichlorogallium, di Gallium compounds such as methyl gallium chloride and dimethyl gallium bromide, and magnesium diphenocene, etc.

[0024] In addition, as carriers inert to organometallic compounds to support these metal organometallic compounds, alumina, silica, mullite, glassy carbon, graphite, potassium titanate, quartz, silicon nitride, nitride Ceramics such as boron and silicon carbide, metals such as stainless steel, aluminum, nickel, and tungsten, fluororesin, glass, etc.

[0025] The shape of the carrier is not particularly limited,...

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Abstract

The invention provides an organometallic compound supplying container which consists of a front end of carrier gas inletting duct disposed on the upper part of the container, a front end of carrier gas outletting duct disposed on the lower part of the container and carrier carried organometallic compound filled in the container. The carrier carried organometallic compound is composed by covering a normal temperature organometallic compound on a carrier which is inactive relative to the organometallic compound. The invention is characterized in that: the front end of carrier gas inletting duct is composed by means of ejecting out the gas supplied by the front end of carrier gas inletting duct while the caontiner is arranged vertically to the direction approximately perpendicular to the central axis.

Description

technical field [0001] The present invention relates to an organometallic compound supply container, and more specifically, to an organometallic compound supply container filled with a carrier-supported organometallic compound coated on a carrier inert with respect to the organometallic compound. It is composed of organometallic compounds that are solid at room temperature. Background technique [0002] Organometallic compounds are used, for example, as raw materials for compound semiconductors in the electronics industry. When an organometallic compound is used in the electronics industry, a carrier gas such as hydrogen is usually blown into contact with the organometallic compound, and introduced into a vapor phase growth apparatus or the like as a saturated vapor of the organometallic compound for use. [0003] In the case of an organometallic compound that is solid at normal temperature (room temperature), unlike a liquid, even if a carrier gas is blown in, a flow path ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C16/448H01L21/00
CPCC23C16/18C23C16/45563H01L21/28556
Inventor 安部寿充赞良宪一
Owner SUMITOMO CHEM CO LTD
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