Preparation for copper-indium-galliun-selenium-sulfur or copper-indium-galliun-selenium or copper-indium-galliun-sulfur film solar cell absorption layer

Abstract

The invention discloses a preparation method for a CIGSeS, CIGSe or CIGS thin-film solar cell absorption layer. After a base conductive film and a metal precursor film are prepared in sequence, a selenylation and / or sulfurization reaction source is excited into free or ionized selenium molecules and / or sulfur molecules in vacuum due to high temperature and plasma discharge, and then selenylation and / or sulfurization reaction is carried out on the metal precursor film. The invention also discloses coating equipment of a CIGSeS, CIGSe or CIGS thin-film solar cell absorption layer which comprises a reaction vessel and a vacuum pump arranged outside the reaction vessel and communicated with the reaction vessel, wherein a rotating axle with an upper end extended into inside the reaction vessel is arranged under the reaction vessel, a plasma generator and a heating device are also arranged in the reaction vessel, and the reaction vessel is also provided with a shielding gas input device and a selenylation and / or sulfurization reaction source device in a communicating way. The invention can keep higher conversion efficiency of the original method, also avoids the use of highly toxic gas such as hydrogen selenide or hydrogen sulphide, enhances the security of coating processing, and also improves the use efficiency of the selenium source and / or the sulfur source.

Description

technical field [0001] The invention relates to a preparation method and coating equipment of a copper indium gallium selenide sulfur or copper indium gallium selenide or copper indium gallium sulfur thin film solar cell absorption layer. Background technique [0002] The existing copper indium gallium selenide sulfur (CuInGaSeS) or copper indium gallium selenide (CuInGaSe) or copper indium gallium sulfur (CuInGaS) thin film solar cell preparation methods are divided into two categories: the first category is called multiple co-evaporation method , the second category is called selenization and / or sulfurization. The multi-component co-evaporation method is characterized by simultaneous evaporation of four components of copper, indium, gallium, and selenium (or sulfur), or first plating indium, gallium, and selenium, then copper, selenium, and finally plating indium, gallium, and selenium in three stages Law. The co-evaporation method is characterized by large film crystals...

AI Technical Summary

Problems solved by technology

However, due to the use of highly toxic hydrogen selenide and hydrogen sulfide during selenization and / or sulfidation, the gas is flammable and explosive, has poor safety, is expensive, difficult to transport and store, and is not safe, environmentally friendly, and cheap. direction of development

Therefore, management and safety measures are extremely important, and complex exhaust gas recovery equipment is required, which requires a large investment

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