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Method for preparing cerium oxide powder using organic solvent and cmp slurry comprising the same

一种二氧化铈、有机溶剂的技术，应用在化学仪器和方法、氧化铈/氢氧化铈、无机化学等方向，能够解决粒度的增加限制等问题

Active Publication Date: 2009-09-23
LG CHEM LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the problem with the synthesis of ceria powder by such mechanochemical method is that the synthesized ceria powder contains a large amount of Na, which is a serious pollutant in semiconductor processing, so a separate cleaning step is necessary.
[0009] Ceria powders prepared by the precipitation method described above are limited in crystal growth and thus increase in particle size
Therefore, when it is desired to produce ceria powder having a particle size not smaller than a specific size, there is a problem in that it is necessary to carry out the solid-phase method accordingly in such a manner as to prepare a hydroxide corresponding to an intermediate product of ceria, followed by heat treatment at a high temperature calcining it

Method used

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  • Method for preparing cerium oxide powder using organic solvent and cmp slurry comprising the same
  • Method for preparing cerium oxide powder using organic solvent and cmp slurry comprising the same
  • Method for preparing cerium oxide powder using organic solvent and cmp slurry comprising the same

Examples

Experimental program
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Effect test

Embodiment 1

[0059] At room temperature, by dissolving 0.2mol of cerium nitrate in a solution containing 100ml of ethylene glycol (dielectric constant at 20°C: 41.4, boiling point: 197°C) and 400ml of ethanol (dielectric constant at 20°C: 25.3, Boiling point: 78.3° C.), the first solution was prepared in a container; at room temperature, the second solution was prepared in another container by dissolving 0.6 mol KOH in a solvent containing a mixture of 100 ml ethylene glycol and 400 ml ethanol. Two solutions; Next, the two solutions are mixed with each other and kept at a temperature of 50°C. While stirring the mixed solution, 0.76 g of hydrogen peroxide (about 30%) was dropped thereinto to cause precipitation for 24 hours. In this way, a yellow-brown powder is obtained.

[0060] XRD analysis confirmed that the resulting powder had a cubic structure of ceria, particle size analysis showed that the powder had an average particle size of 1 to 3 μm, and BET measurements showed that the powde...

Embodiment 2

[0062]Except that a solvent comprising a mixture of 400ml ethylene glycol and 100ml ethanol was used as the solvent for the first and second solutions instead of a solvent comprising a mixture of 100ml ethylene glycol and 400ml ethanol, and the precipitation was performed at a temperature of 120°C instead of 50°C Besides, a brown powder was obtained in the same manner as described in Example 1.

[0063] XRD analysis confirmed that the resulting powder had a cubic structure of ceria, particle size analysis showed that the powder had an average particle size of 100 to 300 nm, and BET measurements showed that the powder had a 113 m 2 / g specific surface area.

Embodiment 3

[0065] In addition to oxygen (O 2 ) gas at 0.3cm 3 / min flow rate into the mixed solution instead of dropping hydrogen peroxide thereinto, the yellow-brown powder was obtained in the same manner as described in Example 1.

[0066] XRD analysis confirmed that the resulting powder had a cubic structure of ceria, particle size analysis showed that the powder had an average particle size of 50 to 100 nm, and BET measurements showed that the powder had a 52 m 2 / g specific surface area.

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Abstract

Disclosed is a method for directly preparing cerium oxide powder in a solution phase by a) mixing a cerium precursor solution with a precipitant solution to cause a reaction; and b) performing oxidation treatment of the reacted solution, wherein at least one kind of pure organic solvent containing no water is used as a solvent for the cerium precursor solution as well as the precipitant solution to thereby prepare the cerium oxide powder, the particle size of which is adjusted to 50nm to 3 mum. Cerium oxide powder obtained from the method and CMP slurry comprising the cerium oxide powder as apolishing agent are also disclosed. The method makes it possible to prepare cerium oxide powder with an average particle size of 50nm or greater and high crystallinity, which is difficult to prepare by the conventional wet precipitation process, by using an organic solvent as a solvent in a wet precipitation process, and the so-prepared cerium oxide powder can be used as a polishing agent for CMPslurry even without being subjected to separate heat treatment.

Description

technical field [0001] The present invention relates to a method of preparing ceria powder by using an organic solvent in a wet process and a CMP slurry comprising the thus prepared ceria powder as a polishing agent. Background technique [0002] As known in the art, ceria (CeO 2 ) is a highly functional ceramic material that is widely used in catalysts, phosphorescent agents, cosmetics, and polishing agents, and recently it is used as a polishing agent in the STI (Shallow Trench Isolation) method for semiconductor devices and as an optical glass The polishing agent has received attention. In particular, when using ceria (CeO 2 ) powder as a polishing agent for CMP slurry, there is an urgent need to synthesize uniform powder with spherical particle shape and small particle size, but the solid-phase method in high temperature (due to its high processing temperature, it is difficult to control the particle size and dispersion) is currently the The only known industry suitab...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C09K3/14C01F17/00C01F17/235
CPCC01P2006/12C01F17/0043C09G1/02C01P2002/72C01P2002/76C01P2004/64C09K3/1409C01P2004/03H01L21/31053C01P2004/62B82Y30/00Y10T428/2982C01F17/235C01F17/10C01P2004/61
Inventor 鲁埈硕吴明焕曹昇范金种珌金长烈
Owner LG CHEM LTD
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