Device and method for preparing optical waveguide in transparent solid material by femtosecond laser

A technology of femtosecond laser and transparent solid, which is applied in the manufacture of two-dimensional or three-dimensional optical waveguides and devices. In the field of devices for manufacturing optical waveguides in transparent solid materials, femtosecond lasers can solve problems such as complex processes and inability to manufacture three-dimensional waveguides. , to achieve the effect of convenient production

Inactive Publication Date: 2009-11-11
NANKAI UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The technical problem to be solved by the present invention is to overcome the shortcomings of traditional optical waveguide manufacturing process complexity and the inability to manufacture three-dimens

Method used

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  • Device and method for preparing optical waveguide in transparent solid material by femtosecond laser
  • Device and method for preparing optical waveguide in transparent solid material by femtosecond laser
  • Device and method for preparing optical waveguide in transparent solid material by femtosecond laser

Examples

Experimental program
Comparison scheme
Effect test

Example Embodiment

[0037] Embodiment 1, the manufacturing device of optical waveguide

[0038] like figure 1 As shown, the production device includes in turn:

[0039] Femtosecond laser system 1: used to provide femtosecond laser pulses for writing optical waveguides;

[0040] Variable attenuator 2: According to the needs of optical waveguide writing, it is used to attenuate the high-energy femtosecond laser pulse output by the femtosecond laser;

[0041] Beam splitter 3: used to split the femtosecond laser pulse attenuated by the variable attenuator;

[0042] Power meter 4: After the femtosecond laser beam is split by the beam splitter, one of the beams is coupled into the power meter to monitor the energy of the femtosecond laser pulse for writing;

[0043]High numerical aperture microscopic objective lens 5: set on the main optical path of the femtosecond laser pulse behind the beam splitter, used to tightly focus the femtosecond laser pulse, and the focused femtosecond pulse is vertically...

Example Embodiment

[0046] Embodiment 2, the manufacture of three-dimensional 1 × 3 optical beam splitter

[0047] A femtosecond laser beam with a center wavelength of 800nm, a pulse width of 50fs, and a repetition rate of 1kHz was used as the writing laser beam, which was tightly focused into the fused silica glass for writing to produce a three-dimensional beam splitter.

[0048] The femtosecond laser 1 produces a femtosecond laser with a central wavelength of 800nm, a pulse width of 50fs, and a repetition rate of 1kHz. The pulse energy can generally reach the order of mJ. The variable attenuator 2 is used to attenuate the femtosecond pulse energy to about 0.5μJ. The beam splitter 3 splits the femtosecond laser beam, and the power meter 4 monitors the energy of the pulse, so that the variable attenuator 2 can be used to adjust the pulse energy to the required energy level accurately and timely. The femtosecond laser beam with adjusted energy is tightly focused by the microscopic objective lens ...

Example Embodiment

[0049] Embodiment 3, the making of two-dimensional Y-shaped beam splitter

[0050] A femtosecond laser with a center wavelength of 775nm, a pulse width of 150fs, and a repetition rate of 1kHz is used as the writing laser beam, and it is tightly focused into a z-cut lithium niobate (LN) crystal to write a buried optical waveguide and produce a two-dimensional Y-type beam splitter.

[0051] The femtosecond laser 1 produces a femtosecond laser with a center wavelength of 775nm, a pulse width of 150fs, and a repetition rate of 1kHz. The pulse energy can reach 0.5mJ. The femtosecond pulse energy is attenuated to about 10μJ by the variable attenuator 2, and the beam splitter is used to 3. The femtosecond laser beam is split, and the power meter 4 monitors the energy of the pulse, so that the variable attenuator 2 can be used to adjust the pulse energy to the required energy level accurately and timely. The femtosecond laser beam with adjusted energy is tightly focused by the micros...

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Abstract

The invention provides a device and a method for preparing optical waveguide in a transparent solid material by femtosecond laser. The device comprises a femtosecond laser system, a variable attenuator, a beam splitter, a power meter, a micro objective, a three-dimensional mobile platform and a CCD detector. The preparation method comprises the following steps of: attenuating the pulse energy to a required size by a femtosecond pulse generated by the femtosecond laser system; making the femtosecond pulse vertically incident under the surface of the transparent material by close focusing of the micro objective; preparing the two-dimensional or three-dimensional optical waveguide by utilizing the change of an refractive index generated due to the non-linear action of the femtosecond laser and the material; and optimally preparing the shape and size of the waveguide by adopting the multiple scan writing or writing the two-wire waveguide. The method has a simple process of writing the buried waveguide in the transparent solid material, can conveniently and highly efficiently prepare couplers, beam splitters, and the two-dimensional or three-dimensional waveguide structure for generating the waveguide of a second harmonic and the like, is simple, novel and highly efficient optical waveguide preparation technology, and can be widely applied in the field of integrated optics.

Description

【Technical field】: [0001] The invention belongs to the technical field of manufacturing optical waveguides and devices, in particular to the manufacturing of two-dimensional or three-dimensional optical waveguides and devices, in particular to a device and method for manufacturing optical waveguides in transparent solid materials using femtosecond lasers. 【Background technique】: [0002] Nonlinear transparent materials such as lithium niobate (LN) and potassium titanyl phosphate (KTP) have been widely used in the fields of integrated optics and photonics. At present, in many applications of integrated optics, it is necessary to fabricate optical waveguides or waveguide arrays in transparent materials such as LN and KTP, and the use of ion diffusion and proton exchange techniques can well fabricate waveguide structures. Although these technologies are mature and can also produce waveguides with low transmission loss, they can only fabricate two-dimensional optical waveguide s...

Claims

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Application Information

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IPC IPC(8): G03F7/00G02B6/122G02B6/26G02F1/377
Inventor 涂成厚张双根吕福云李勇男王宏杰
Owner NANKAI UNIV
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