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Silicon cantilever sensor, preparation method and application thereof

A cantilever beam and sensor technology, applied in the field of micro-nano sensors

Inactive Publication Date: 2009-12-02
SHANGHAI APPLIED TECHNOLOGIES COLLEGE
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Due to the small mass of relatively small molecules such as chemical gases, only a single layer or a small number of layers of small molecules are specifically adsorbed on the surface of the cantilever beam, and the small mass adsorbed is often difficult to detect by resonance methods

Method used

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  • Silicon cantilever sensor, preparation method and application thereof
  • Silicon cantilever sensor, preparation method and application thereof
  • Silicon cantilever sensor, preparation method and application thereof

Examples

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Embodiment 1

[0046] Explosive trinitrotoluene (TNT) chemical gas sensor

[0047] This implementation application takes the detection of explosive trinitrotoluene (TNT) gas as an example to describe the application of the present invention in chemical gas detection in detail.

[0048] Explosives Trinitrotoluene (TNT) is a commonly used explosive and is therefore an extremely hazardous hazard. Effective detection of TNT volatile gas will provide technical support for security checks and anti-terrorism in transportation hubs and important locations such as airports, stations, ports, and customs, and is of great significance to ensuring public safety.

[0049] Fabrication of a 300μm×100μm×3μm porous silicon cantilever beam sensor, see attached figure 2 , the first resonance frequency of its bending mode is around 100kHz, and its specific preparation steps are as follows:

[0050] (a), wafer pretreatment

[0051] A double-sided polished SOI silicon wafer with n-type doped (100) crystal plan...

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Abstract

The invention relates to a silicon cantilever sensor, a preparation method and application thereof, and belongs to the field of micro-nano sensors. A porous silicon structure is formed in hydrofluoric acid solution nearby a free tail end of a cantilever through a selective anodic oxidation method. By using the increased specific surface structure of a porous silicon area, large amount of linear polymer or hyper-branched polymer sensitive molecules with silicon-oxygen head groups and specific tail groups for specificity identification are self-assembled on the inner wall of a silicon hole, and large amount of detected chemical molecules can be specifically captured to accumulate the capturing mass of larger detected substances. The silicon cantilever sensor has the advantages of simple structure, convenient manufacture and easy realization, and can be applied to trace chemical gas detection.

Description

technical field [0001] The invention relates to a silicon cantilever beam sensor, a preparation method and application thereof, and belongs to the field of micro-nano sensors. Background technique [0002] Sensors are the core detection devices in measuring instruments and detection systems. As one of the working principles of the sensor, the output of the resonant sensor is a frequency change signal, its precision and resolution are high, and the frequency interface with the computer can be realized through a simple digital circuit, thus eliminating the need for complex A / D Conversion device. Recently, with the development of microelectronics technology and micromachining technology, micromechanical resonant sensors manufactured by micromachining technology have aroused people's special interest. The sensitive element of the resonant micro-mechanical cantilever sensor is a micro-cantilever beam made by microelectronics and micro-mechanical technology as a mechanical reson...

Claims

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Application Information

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IPC IPC(8): G01N5/00G01G3/16G01D5/12G01H9/00B81B7/02B81C1/00B81C5/00B81C3/00B81C99/00
Inventor 郑丹李文琼袁联群董瑾郭强
Owner SHANGHAI APPLIED TECHNOLOGIES COLLEGE
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