Preparation method of CdTe film solar cell
A technology of solar cells and thin films, which is applied in the manufacture of circuits, electrical components, and final products. It can solve problems such as understanding and scattered CdTe solar cells, and achieve the effects of increasing effectiveness, reducing intermediate pollution links, and improving battery efficiency.
Inactive Publication Date: 2009-12-23
上海联孚新能源科技集团有限公司
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The invention discloses a preparation method of a CdTe film solar cell; a CdTe film adopts a near space sublimation method to prepare a CdS/CdTe cell on transparent conductive glass, a Ni back electrode is obtained by adopting magnetron sputtering. The preparation method comprises the following steps: firstly, carrying out transparent glass substrate pre-treatment; preparing an In2O3: F transparent conductive film; using the near space sublimation method to grow a CdS film on the prepared transparent conductive film; using the near space sublimation method to grow the CdTe film on the prepared CdS film, and using CdCl2 to carry out annealing treatment on the film to cause a CdS/CdTe interface to be recombined; using a magnetron sputtering instrument to sputter the Ni back electrode on the CdTe surface, and annealing to form ohm contact at high temperature; obtaining the effective CdTe film solar cell. In the invention, the magnetron sputtering instrument is connected with a near space subliming furnace by a gate valve, a magnetic manipulator is used to deliver samples, and the whole procedures are automatically finished under vacuum environment after the step that the glass substrate enters a pre-treatment chamber.
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