Preparation method of CdTe film solar cell

A technology of solar cells and thin films, which is applied in the manufacture of circuits, electrical components, and final products. It can solve problems such as understanding and scattered CdTe solar cells, and achieve the effects of increasing effectiveness, reducing intermediate pollution links, and improving battery efficiency.

Inactive Publication Date: 2009-12-23
上海联孚新能源科技集团有限公司
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However, at present, people's understanding of the characteristics and preparation metho

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  • Preparation method of CdTe film solar cell
  • Preparation method of CdTe film solar cell

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[0024] The CdTe thin film solar cell is prepared according to the following preparation process:

[0025] (1) Pretreatment of transparent glass substrate 1: 1713 glass is used as deposition substrate 1. Acetone ultrasonic cleaning is used for 10 minutes to remove grease on the surface, and then deionized water ultrasonic cleaning for 10 minutes to remove impurities on the glass surface; finally, the glass is dried and placed in a pretreatment chamber, and the glass substrate 1 is cleaned by plasma.

[0026] (2) Preparation of In 2 O 3 : F transparent conductive film 2: transfer the transparent glass substrate 1 from the robotic arm 10 to the sample stage of the magnetron sputtering instrument 9, and the sputtering target is high-purity In 2 O 3 . First use a vacuum pump to vacuum the sputtering chamber to 3Pa, and then use a molecular pump to vacuum the reaction chamber to 1×10 -3 Pa. Ar gas and 5% CHF 3 , Adjust the flow rate to 30ml / min; adjust the reaction pressure to 0.2Pa; sp...

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Abstract

The invention discloses a preparation method of a CdTe film solar cell; a CdTe film adopts a near space sublimation method to prepare a CdS/CdTe cell on transparent conductive glass, a Ni back electrode is obtained by adopting magnetron sputtering. The preparation method comprises the following steps: firstly, carrying out transparent glass substrate pre-treatment; preparing an In2O3: F transparent conductive film; using the near space sublimation method to grow a CdS film on the prepared transparent conductive film; using the near space sublimation method to grow the CdTe film on the prepared CdS film, and using CdCl2 to carry out annealing treatment on the film to cause a CdS/CdTe interface to be recombined; using a magnetron sputtering instrument to sputter the Ni back electrode on the CdTe surface, and annealing to form ohm contact at high temperature; obtaining the effective CdTe film solar cell. In the invention, the magnetron sputtering instrument is connected with a near space subliming furnace by a gate valve, a magnetic manipulator is used to deliver samples, and the whole procedures are automatically finished under vacuum environment after the step that the glass substrate enters a pre-treatment chamber.

Description

Technical field: [0001] The invention relates to a manufacturing method based on CdTe thin-film solar cells, which belongs to the field of manufacturing inorganic compound energy materials. Background technique: [0002] With the growth of population and economy in today's world, the increasing scarcity of energy resources, the deterioration of the environment and the increasing demand for electric energy, the development and utilization of solar energy has set off an upsurge worldwide. This is very conducive to the sustainable development of the ecological environment and the benefit of future generations, so countries around the world are investing in research and development of solar cells. Solar energy is a clean, non-polluting, inexhaustible natural energy source. Almost all natural resources on which human beings depend are converted to solar energy. Direct conversion of solar energy into electrical energy is an important technology for large-scale utilization of solar...

Claims

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Application Information

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IPC IPC(8): H01L31/18C23C14/35C23C14/22C23C14/06
CPCY02P70/521Y02P70/50
Inventor 赖建明苏青峰张根发刘红梅冯世军韩新江杨文平胡之骥
Owner 上海联孚新能源科技集团有限公司
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