Miniature extrinsic Fabry-Perot type optical fiber pressure transducer and manufacturing method thereof

Abstract

The invention discloses a miniature extrinsic Fabry-Perot (FP) type optical fiber pressure transducer, which is constructed by monomode optical fiber and multimode optical fiber, the end face with a concave cavity of multimode optical fiber and one end face of the monomode optical fiber are welded and spliced to from an FP cavity. The manufacturing method thereof comprises the steps of: cutting out plane end faces of the monomode optical fiber and the multimode optical fiber, grinding and polishing; and inserting the end face of the multimode optical fiber into HF acid buffer solution to be corroded to form the concave cavity, welding and splicing with the ground and polished end face of the monomode optical fiber to form the FP cavity. Light can directly enter into the FP cavity via the optical fiber, thus avoiding influence of other mediums on light path; the manufacturing materials of the transducer are common monomode optical fiber and multimode optical fiber with cheap price; themanufacturing process only adopts methods of cutting, corroding, and welding and splicing; the mechanical performance of the transducer is high and the manufacturing is simple; therefore, an optical fiber pressure transducer featuring simple manufacturing, high preciseness, high sensitivity and good reliability can be realized in virtue of the invention.

Description

technical field [0001] The present invention relates to an extrinsic Fabry-Perot type optical fiber pressure sensor, in particular to a process technology of optical fiber wet etching, adopting the wet etching process to make a concave cavity on the end face of the optical fiber, and fusing a section of optical fiber by fusion splicing technology , forming a miniature pressure sensor. Background technique [0002] The existing extrinsic Fabry-Perot (FP) interferometer is mainly used to measure strain, which is composed of two cut fiber end faces placed in a quartz capillary and an air gap in the middle to form a resonant cavity . Such sensors have many problems in FP cavity length control and fiber fixation. figure 1 is its basic structure. [0003] At present, in terms of the production technology of micro sensors, Micro Electro Mechanical System (MEMS) technology has been relatively mature. It integrates mechanical components, sensors, actuators and electronic component...

AI Technical Summary

Problems solved by technology

This kind of production process requires high-precision masks, and the requirements for lithography machines are relatively high. In addition, through anodic bonding of silicon and optical fibers, special borosilicate optical fibers are required, and the fixing of optical fibers is also difficult.

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