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Method for preparing polyvinylidene fluoride piezo film with microstructure

A polyvinylidene fluoride piezoelectric and polyvinylidene fluoride technology is applied in the field of preparation of polyvinylidene fluoride piezoelectric films, which can solve the problems of polymer film defects and inability to manufacture micro-devices, and achieve the effect of easy alignment and orientation

Inactive Publication Date: 2012-01-04
XI AN JIAOTONG UNIV +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0008] Aiming at the technical problem in the prior art that it is impossible to make micro devices by encapsulating the film after high temperature stretching and polarization treatment on the substrate, directly forming and polarizing the film on the silicon substrate will cause defects to the polymer film, the present invention proposes The following technical solutions:

Method used

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  • Method for preparing polyvinylidene fluoride piezo film with microstructure
  • Method for preparing polyvinylidene fluoride piezo film with microstructure
  • Method for preparing polyvinylidene fluoride piezo film with microstructure

Examples

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Effect test

Embodiment 1

[0028] A preparation method of a polyvinylidene fluoride piezoelectric film with a microstructure:

[0029] 1) Preparation of the metal electrode layer 3: prepare a layer of 300nm SiO on the silicon substrate 1 2 Make an insulating isolation layer 2, and then sputter a 100nm metal electrode layer 3 on the insulating isolation layer 2, such as figure 1 shown;

[0030] 2) Configuration of polymer solution: polyvinylidene fluoride PVDF powder or polyvinylidene fluoride PVDF and its copolymer powder are used as a solute, dissolved in a mixed solution of dimethylformamide DMF and acetone at 15°C to prepare A polymer solution with a concentration of 70g / L, the volume ratio of dimethylformamide DMF to acetone in the mixed solution is 95:5, stirred with a magnetic stirrer for 60 minutes, placed in vacuum for 1 / 2 hour, and sealed for 72 hours;

[0031] 3) Polymer solution spin-coating: Spin-coat the solution prepared in step 2) on the metal electrode layer 3 with a commercially avail...

Embodiment 2

[0036] A preparation method of a polyvinylidene fluoride piezoelectric film with a microstructure:

[0037] 1) Preparation of the metal electrode layer 3: prepare a layer of 400nm SiO on the silicon substrate 1 2 Make an insulating isolation layer 2, and then sputter a 200nm metal electrode layer 3 on the insulating isolation layer 2, such as figure 1shown;

[0038] 2) Configuration of polymer solution: Polyvinylidene fluoride PVDF powder is used as a solute, dissolved in a mixed solution of dimethylformamide DMF and acetone at 20°C, and the volume ratio of dimethylformamide DMF to acetone is 30:70, prepared into a polymer solution with a concentration of 40g / L, stirred with a magnetic stirrer for 60 minutes, placed in vacuum for 2 hours, and sealed for 12 hours;

[0039] 3) Polymer solution spin coating: use a commercially available spin coater to spin coat the prepared solution on the metal electrode layer 3 at a speed of 1000 rpm to obtain a polymer layer 4, such as fig...

Embodiment 3

[0044] A preparation method of a polyvinylidene fluoride piezoelectric film with a microstructure:

[0045] 1) Preparation of the metal electrode layer: prepare a layer of 500nm SiO on the silicon substrate 1 2 Make an insulating isolation layer 2, and then sputter a 400nm metal electrode layer 3 on the insulating isolation layer 2, such as figure 1 shown;

[0046] 2) Configuration of polymer solution: polyvinylidene fluoride PVDF powder or polyvinylidene fluoride PVDF and its copolymer powder are used as solute, dissolved in a mixed solution of dimethylformamide DMF and acetone at 17°C to prepare Concentration is the polymer solution of 45g / L, the volume ratio of dimethylformamide DMF and acetone is 50:50, after stirring the polymer solution with a magnetic stirrer for 30 minutes, put the polymer solution in a vacuum for 1 hour, seal and place 45 hours;

[0047] 3) Polymer solution spin-coating: Spin-coat the solution prepared in step 2) on the metal electrode layer 3 with...

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Abstract

The invention belongs to the field of micro / nano manufacture, and relates to a method for preparing a polyvinylidene fluoride piezo film with a microstructure. The method comprises the following steps: 1) sputtering an insulating layer on a substrate, and sputtering an electrode layer on the insulating layer; 2) taking polyvinylidene fluoride (PVDF) and copolymer powder thereof as solute to dissolve in the mixed solution, stirring, placing in vacuum and sealing; 3) spin coating the polymer solution on the electrode layer to obtain a polymer layer; 4) placing the substrate spin coated with thepolymer solution on a hot-press stamp pad, pressing a die to the surface of the polymer layer, vacuumizing the die cavity so that the cavity is full of the polymer; 5) applying field voltage between the electrode layer and the die; and 6) after withdrawing the electric field, controlling a stamp head to press towards the polymer layer, keeping the pressure, cooling to 80 DEG C, and annealing to obtain the polyvinylidene fluoride piezo film with the microstructure. The invention is utilized in manufacture of micro transducers and actuators, in particular is suitable for manufacture of biomedical micro transducers and actuator.

Description

technical field [0001] The invention belongs to the field of micro-nano manufacturing, and relates to a preparation method of a polyvinylidene fluoride piezoelectric film with a microstructure. Background technique [0002] Polyvinylidene fluoride PVDF and its copolymers have the advantages of biocompatibility, flexibility, and easy molding that other piezoelectric materials do not have. However, the existing process of preparing such materials into piezoelectric films hinders their application in microsensors and actuator applications. [0003] Polyvinylidene fluoride PVDF and its copolymers are prepared into films, and different crystal phases (α, β, γ and δ) will be generated under different process molding conditions. Due to the limitations of intermolecular steric and electrostatic interactions, polymer crystallization makes most crystal structures tend to a low-energy configuration, that is, α crystal form or its close γ crystal form. Therefore, it is easy to form α-...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B81C1/00
Inventor 丁玉成刘红忠安宁丽卢秉恒刘亚雄
Owner XI AN JIAOTONG UNIV
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