Preparation method of chromium nitride titanium aluminum nitrogen gradient hard reaction film

Abstract

The invention discloses a preparation method of a chromium nitride titanium aluminum nitrogen gradient hard reaction film. The preparation method sequentially comprises the steps of: firstly, deposition technology and determination of target elements; secondly, selection and pretreatment of workpieces; thirdly, determination of pre-bombardment technique; fourthly, determination of the deposition technique; fifthly, processing of vacuum heating; and sixthly, rotation of workpieces. In the invention, according to the method of preparing a multi-arc ion plated CrTiAlN nitrogen gradient hard reaction film by adopting a combination target of a chromium target and titanium aluminum alloy target, the CrTiAlN nitrogen gradient hard reaction film can be obtained; in addition, the nitrogen content of the CrTiAlN nitrogen gradient hard reaction film are distributed in gradient, the adhesive force is strong (not less than 150 N), and the hardness is high (not less than HV4200). The preparation method reduces the film coating cost, guarantees the synchronous realization of the high film layer hardness and adhesive force, reduces the internal stress of the film and has excellent stability and repeatability.

Description

Technical field: [0001] The invention relates to a method for preparing a nitrogen gradient hard reaction film, in particular to a method for preparing a multi-arc ion nitrogen-plating gradient hard reaction film by using a combined target, such as a chromium nitride titanium aluminum nitrogen gradient hard reaction film (hereinafter referred to as "" CrTiAlN" instead of "chromium titanium aluminum nitride") preparation method. Background technique: [0002] Multi-arc ion plating is a vacuum physical deposition technology with multiple cathode arc evaporation sources that can be evaporated simultaneously. It has the remarkable characteristics of fast deposition speed, dense film structure, strong adhesion, and good uniformity. This technology is suitable for the preparation of hard films and hard reactive gradient films, and has been successfully applied in the preparation of titanium nitride, titanium aluminum nitride and more hard reactive films. Titanium aluminum nitride...

AI Technical Summary

Problems solved by technology

[0003] For the single-layer multi-component hard reaction film and the titanium-based multi-component hard reaction gradient film, there are mainly the following disadvantages: 1. The multi-component alloy target is not easy to buy in the market, and often requires special melting and processing. Not only the cost is high, but also the cycle is long; 2. Generally, the contradiction between the hardness of the film layer and the adhesion of the film layer is easy to appear, that is, the hardness and adhesion force are difficult to meet at the same time; 3. It is easy to generate large internal stress in the film layer , affecting the use effect and service life of the hard film