Density sensor chip based on micro electro mechanical system technology and preparation method thereof

Abstract

The invention discloses a cantilever beam type density sensor chip based on a micro electro mechanical system technology and a preparation method thereof. The chip adopts a trapezoid silicon micro cantilever beam structure based on a vibrating principle, a lead wire adopts a Ti-Pt-Au beam type lead wire, and a Ti-Pt-Au beam type fly wire is added. By adopting the trapezoid structure, the density sensor chip has the advantage of high sensitivity; by adopting the Ti-Pt-Au beam type lead wire, the density sensor chip has the advantages of corrosion resistance, high temperature resistance, low calorific value and the like compared with a traditional aluminum lead wire; and by adopting the Ti-Pt-Au fly wire, single input and single output of the lead wire are realized, thereby guaranteeing that currents inside the lead wire are equal everywhere, and further ensuring uniform distribution of magnetic field force in a whole MEMS vibrating cantilever beam chip after placing the lead wire into a magnetic field.

Description

Technical field: [0001] The invention relates to the field of density sensors, in particular to a density sensor chip with a vibrating cantilever beam structure using micro-electromechanical systems (MEMS) technology and a preparation method thereof. Background technique: [0002] The traditional fluid density measurement method mainly obtains the density of the fluid by measuring the force (buoyancy or water pressure) according to Archimedes' law or the fluid pressure formula. The main methods are force-sensitive method, differential pressure method, buoyancy method, static balance method, etc. There are also many density sensors based on these methods. Not high, some are expensive equipment, and most of them use on-site sampling and then laboratory measurement, which is difficult to achieve real-time online measurement. The newly developed fluid density measurement methods mainly include vibrating tube method and quartz crystal method. The former uses the resonant freque...

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Problems solved by technology

However, the low sensitivity of the rectangular cantilever beam directly leads to a high density measurement error (±10%); and the aluminum leads used are easily corroded when the sensor is manufactured and used, resulting in low yield and poor reliability of the sensor; The right angle at the turn leads to the uneven distribution of the Lorentz force on the entire cantilever beam after the lead wire is energized and placed in the magnetic field, which affects the service life of the sensor

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