Solar cell of sandwich structure consisting of Si/FeSi2/Si and manufacturing method thereof
A solar cell and sandwich technology, which is applied in the direction of final product manufacturing, sustainable manufacturing/processing, circuits, etc., can solve the problems of low photoelectric conversion efficiency and low open circuit voltage, so as to improve photoelectric conversion efficiency, reduce high defect density, The effect of simple production process
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[0034] Below in conjunction with accompanying drawing, concrete design and implementation mode of the present invention are described in detail:
[0035] refer to Figure 5 (a), Si / FeSi designed for the present invention 2 / Si thin film photovoltaic cell device structure diagram. In order to match the manufacturing process of the current amorphous silicon thin-film solar energy production line, this design uses transparent materials as the substrate, such as glass. When the P-i-N structure is adopted, the SnO with a textured structure using the transparent conductive glass TCO as the transparent substrate 1 2 : F on the transparent conductive film 2, first deposit a layer of 400nm thick boron-doped P-type silicon doped layer 3, the doping concentration is 5 × 10 19 / cm 2 . Then deposit a second layer of undoped intrinsic FeSi with a thickness of 2000nm 2 layer, continue to deposit a phosphorus-doped n-type silicon doped layer with a thickness of 2000nm, and a doping conc...
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