Metal nano particle composite material and preparation method thereof

A technology of metal nanoparticles and composite materials, applied in the field of metal nanoparticle composite materials and their preparation, to achieve the effect of controllable physical properties and simple preparation methods

Inactive Publication Date: 2012-10-10
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

For example, in super-resolution optical disk storage, the recording area is some sub-wavelength points, and the above method is not suitable for forming metal nanoparticle composites only in the recording point area (generally 50-800nm ​​in diameter)

Method used

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  • Metal nano particle composite material and preparation method thereof
  • Metal nano particle composite material and preparation method thereof

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preparation example Construction

[0024] The preparation method of the metal nanoparticle composite material, the method comprises the following steps:

[0025] ① depositing the metal layer 2, the phase change material layer 3 and the protective layer 4 sequentially on the substrate 1 to form a multi-layer structure film;

[0026] ②Using laser pulses to irradiate the multilayer structure film to form a composite material 5 in which metal nanoparticles are dispersed in the phase change material.

[0027] The preparation method of composite material 5 uses magnetron sputtering equipment, and the degree of vacuum is 1.0×10 -4 Under the condition of Pa, the metal layer 2 , the phase change material layer 3 and the protection layer 4 are sequentially sputtered on the substrate 1 . Then, the nanosecond (picosecond or femtosecond) pulsed laser 7 is used to act on the multilayer film structure through the objective lens 6 with a numerical aperture of 0.9, and the metal nanoparticle composite material 5 is formed in t...

Embodiment 1

[0030] refer to figure 1 , figure 1 Schematic diagram of the preparation method of the metal nanoparticle film of the present invention. The multilayer film structure is sputtering a metal layer 2 and a phase change material layer 3 on a substrate 1 in sequence. The basic process is roughly:

[0031] Using magnetron sputtering equipment, the vacuum degree is 1.0×10 -4 Under the condition of Pa, on the clean glass substrate 1, Ag metal layer (film thickness 40nm), Ge 2 Sb 2 Te 5 A phase change material layer (thickness: 40nm) forms a multilayer film structure. Then, a nanosecond pulsed laser 7 with a wavelength of 488nm, a pulse width of 200ns, and a power of 12mW is used to act on the multilayer film structure through an objective lens 6 with a numerical aperture of 0.9, and a metal nanoparticle composite material 5 is formed in the focused laser action area. . The near-field light distribution characteristics (numerical simulation) of the plane wave laser with a wavel...

Embodiment 3

[0033] The basic process is roughly:

[0034] The multi-layer film structure is sputtering a metal layer 2 , a phase change material layer 3 and a protective layer 4 on a substrate 1 in sequence.

[0035] Using magnetron sputtering equipment, the vacuum degree is 1.0×10 -4 Under the condition of Pa, on the clean glass substrate 1, Ag metal layer 2 (thickness 60nm), Ge 2 Sb 2 Te 5The phase change material layer 3 (film thickness 40nm) and the SiN protective layer 4 (10nm) form a multi-layer film structure. Then, a nanosecond pulsed laser 7 with a wavelength of 488nm, a pulse width of 200ns, and a power of 12mW is used to act on the multilayer film structure through an objective lens 6 with a numerical aperture of 0.9, and a metal nanoparticle composite material 5 is formed in the focused laser action area. .

[0036] The specific preparation process parameters of other embodiments are shown in Table 1 below, and I will not repeat the description.

[0037] Table 1

[0038...

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Abstract

The invention relates to a metal nano particle composite material and a preparation method thereof. The metal nano particle composite material comprises a multi-layer structure film of a metal layer, a phase-change material layer and a protecting layer which are deposited on a substrate, and a composite material of metal nano particles is distributed in the phase-change substrate material in a dispersive way. In the preparation method, the metal layer / phase-change layer / protecting layer film structure deposited on the substrate is irradiated by utilizing a pulse laser so that the irradiated area forms the composite material, the metal nano particles of which are scattered in the phase-change substrate material after smelted and cooled. The size and the distribution of the metal nano particles in the composite material can be adjusted by changing the parameter of a laser pulse, the optical constant of the phase-change substrate material can be adjusted by changing the annealing processing condition, and the area for forming the composite material can be adjusted by shifting a laser action area.

Description

technical field [0001] The invention relates to a nanocomposite material, in particular to a metal nanoparticle composite material with adjustable properties and a preparation method thereof. It can be used for super-resolution optical storage to improve the signal-to-noise ratio of readout signals. It can also be used in the fields of surface plasmon optics, near-field optics, surface-enhanced Raman spectroscopy, phase-change storage, optical switches, optical guided waves, and optical sensing. Background technique [0002] In recent years, with the development of nanomaterials technology, many novel optical properties have been shown in the process of laser interacting with nanocomposite materials and subwavelength surface structures, which has attracted great attention. Nanoparticle composite materials are a class of nanomaterials with broad application prospects. It mainly uses the specific properties of nanoparticles in light, electricity, and magnetism, and endows mat...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B32B9/04B32B15/04C23C14/35C23C14/58
Inventor 黄欢王阳翟凤潇吴谊群
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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