Array waveguide light-splitting based infrared spectrum MEMS (Micro-electromechanical System) gas sensitive transducer
A gas sensor and infrared spectrum technology, applied in the field of gas sensor, can solve the problems of weak anti-interference ability, low sensitivity, poor selectivity, etc., and achieve the effects of fast response, high sensitivity, linearity and precision improvement
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0032] In order to make the purpose of the present invention, technical solutions and advantages clearer, the following in conjunction with the analysis of chloroform (chloroform) vapor in the ambient gas is a specific example, and with reference to the accompanying drawings, the present invention is further described in detail.
[0033] Such as figure 1 as shown, figure 1 It is a schematic diagram of the planar structure of the infrared spectroscopic MEMS gas sensor based on arrayed waveguide spectroscopy provided by the present invention. The sensor uses the infrared transmission spectrum of the gas for gas detection, distinguishes the gas type through the characteristic peak of the transmission spectrum, and determines the gas content by measuring the absorbance of infrared light with a characteristic wavelength. The invention effectively solves the problems of low sensitivity, limited service life and no vector detection capability of existing gas sensors, is compatible w...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com